Hardmask process for forming a reverse tone image using polysilazane
DAMMEL RALPH R, TAKANO YUSUKE, LI JIN, KUROSAWA KAZUNORI, ABDALLAH DAVID
Year of Publication 27.12.2011
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Year of Publication 27.12.2011
Patent
Hardmask process for forming a reverse tone image using polysilazane
Abdallah, David, Dammel, Ralph R, Takano, Yusuke, Li, Jin, Kurosawa, Kazunori
Year of Publication 27.12.2011
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Year of Publication 27.12.2011
Patent
A HARDMASK PROCESS FOR FORMING A REVERSE TONE IMAGE USING POLYSILAZANE
ABDALLAH, DAVID, J, TAKANO, YUSUKE, KUROSAWA, KAZUNORI, DAMMEL, RALPH, R, LI, JIN
Year of Publication 21.12.2011
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Year of Publication 21.12.2011
Patent
PHOTOACTIVE COMPOUNDS
RAHMAN, M., DALIL, VAN WERDEN, KARL, DAMMEL, RALPH, R, RENTKIEWICZ, DAVID, L
Year of Publication 07.09.2011
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Year of Publication 07.09.2011
Patent