Chamber for constructing a film on a semiconductor wafer
DANEK, MICHAL, ENGLHARDT, ERIC, DUBOIS, DALE R, MORRISON, ALAN F, KAO, YEH-JEN, LIAO, MARVIN, CHANG, MAI
Year of Publication 14.01.1998
Get full text
Year of Publication 14.01.1998
Patent
PRIMARY FLOW CVD APPARATUS AND METHOD
ARTHUR J. LEARN, DALE R. DUBOIS, RICHARD A. SEILHEIMER, NICHOLAS E. MILLER
Year of Publication 21.12.1992
Get full text
Year of Publication 21.12.1992
Patent
Tunable ground planes in plasma chambers
JUCO, ELLER Y, ROCHA-ALVAREZ, JUAN CARLOS, SIVARAMAKRISHNAN, VISWESWAREN, NOWAK, THOMAS, DUBOIS, DALE R, M'SAAD, HI, BANSAL, AMIT, AYOUB, MOHAMAD, FODOR, MARK A, JANAKIRAMAN, KARTHIK
Year of Publication 16.12.2009
Get full text
Year of Publication 16.12.2009
Patent
Vacuum reaction chamber with x-lamp heater
ROCHA ALVAREZ JUAN CARLOS, DUBOIS DALE R, IWASAKI NAOYUKI, SHIMIZU TAKASHI, ELSHEREF KHALED A, M. SAAD HI, AL BAYATI AMIR, SHAH ASHISH, D. CRUZ LESTER A, DEMOS ALEXANDROS T
Year of Publication 15.12.2010
Get full text
Year of Publication 15.12.2010
Patent
VORRICHTUNG ZUR CHEMISCHEN DAMPFASSSCHEIDUNG
CAMPBELL, BRYANT A, DUBOIS, DALE R, MANRIQUEZ, RALPH F, MILLER, NICHOLAS E
Year of Publication 15.04.1990
Get full text
Year of Publication 15.04.1990
Patent
CHEMICAL VAPOR DEPOSITION APPARATUS
CAMPBELL, BRYANT A, DUBOIS, DALE R, MANRIQUEZ, RALPH F, MILLER, NICHOLAS E
Year of Publication 21.03.1990
Get full text
Year of Publication 21.03.1990
Patent
CHEMICAL VAPOUR DEPOSITION
BRYANT A. CAMPBELL, DALE R. DUBOIS, RALPH F. MANRIQUEZ, NICHOLAS E. MILLER
Year of Publication 19.05.1988
Get full text
Year of Publication 19.05.1988
Patent
CHEMICAL VAPOR DEPOSITION APPARATUS
CAMPBELL, BRYANT A, DUBOIS, DALE R, MANRIQUEZ, RALPH F, MILLER, NICHOLAS E
Year of Publication 15.07.1987
Get full text
Year of Publication 15.07.1987
Patent
CHEMICAL VAPOR DEPOSITION APPARATUS
CAMPBELL, BRYANT A, DUBOIS, DALE R, MANRIQUEZ, RALPH F, MILLER, NICHOLAS E
Year of Publication 13.01.1987
Get full text
Year of Publication 13.01.1987
Patent
Chemical vapor deposition apparatus
MANRIQUEZ; RALPH F, CAMPBELL; BRYANT A, MILLER; NICHOLAS E, DUBOIS; DALE R
Year of Publication 10.09.1985
Get full text
Year of Publication 10.09.1985
Patent
Substrate loading means for a chemical vapor deposition apparatus
MANRIQUEZ; RALPH F, CAMPBELL; BRYANT A, MILLER; NICHOLAS E, DUBOIS; DALE R
Year of Publication 25.06.1985
Get full text
Year of Publication 25.06.1985
Patent
Chemical Vapor deposition apparatus
CAMPBELL, BRYANT A, DUBOIS, DALE R, MANRIQUEZ, RALPH F, MILLER, NICHOLAS E
Year of Publication 17.04.1985
Get full text
Year of Publication 17.04.1985
Patent
CHEMICAL VAPOR DEPOSITION APPARATUS
BRYANT A. CAMPBELL, DALE R. DUBOIS, RALPH F. MANRIQUEZ, NICHOLAS E. MILLER
Year of Publication 27.03.1985
Get full text
Year of Publication 27.03.1985
Patent
CHEMICAL VAPOUR DEPOSITION
BRYANT A. CAMPBELL, DALE R. DUBOIS, RALPH F. MANRIQUEZ, NICHOLAS E. MILLER
Year of Publication 07.03.1985
Get full text
Year of Publication 07.03.1985
Patent
KEMISK DAMPAFSAETNINGSAPPARAT
MILLER NICHOLAS E, DUBOIS DALE R, MANRIQUEZ RALPH F, CAMPBELL BRYANT A
Year of Publication 01.03.1985
Get full text
Year of Publication 01.03.1985
Patent
KJEMISK PAADAMPINGSAPPARAT
CAMPBELL, BRYANT A, DUBOIS, DALE R, MANRIQUES, RALPH F, MILLER, NICHOLAS E
Year of Publication 01.03.1985
Get full text
Year of Publication 01.03.1985
Patent
Lift fingers for substrate processing apparatus
ROSE; RON L, CHEW; SANDY M.-S, WONG; MANUS K, MORRISON; ALAN F, LEUNG; CISSY, CLARK; SHANE D, DUBOIS; DALE R
Year of Publication 26.07.1994
Get full text
Year of Publication 26.07.1994
Patent
Vacuum reaction chamber with X-lamp heater
ROCHA-ALVAREZ, JUAN CARLOS, SHIMIZU, TAKASHI, ELSHEREF, KHALED A, D'CRUZ, LESTER A, SHAH, ASHISH, DUBOIS, DALE R, M'SAAD, HI, AL-BAYATI, AMIR, IWASAKI, NAOYUKI, DEMOS, ALEXANDER T
Year of Publication 16.04.2007
Get full text
Year of Publication 16.04.2007
Patent
Chamber for constructing a film on a semiconductor wafer
DANEK, MICHAL, ENGLHARDT, ERIC A, DALE R. DUBOIS, CHANG, MEI, KAO, YEH-JEN, LIAO, MARVIN, ALAN F. MORRISON
Year of Publication 11.06.1999
Get full text
Year of Publication 11.06.1999
Patent