Multi-zone pedestal for plasma processing
Lin, Xing, Yang, Bozhi, Dubois, Dale R, Rocha-Alvarez, Juan Carlos, Sankarakrishnan, Ramprakash, Zhou, Jianhua
Year of Publication 06.04.2021
Get full text
Year of Publication 06.04.2021
Patent
MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING
SANKARAKRISHNAN, Ramprakash, YANG, Bozhi, ZHOU, Jianhua, ROCHA-ALVAREZ, Juan Carlos, LIN, Xing, DUBOIS, Dale R
Year of Publication 31.01.2019
Get full text
Year of Publication 31.01.2019
Patent
Multi-zone pedestal for plasma processing
Lin, Xing, Yang, Bozhi, Dubois, Dale R, Rocha-Alvarez, Juan Carlos, Sankarakrishnan, Ramprakash, Zhou, Jianhua
Year of Publication 02.10.2018
Get full text
Year of Publication 02.10.2018
Patent
Process kit including flow isolator ring
Wang, Yanjie, Ghosh, Kalyanjit, Baluja, Sanjeev, Dubois, Dale R, Chuc, Kien N, Kim, Sungjin, Kulkarni, Mayur G
Year of Publication 30.10.2018
Get full text
Year of Publication 30.10.2018
Patent
MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING
YANG Bozhi, ZHOU Jianhua, SANKARAKRISHNAN Ramprakash, LIN Xing, DUBOIS Dale R, ROCHA-ALVAREZ Juan Carlos
Year of Publication 14.09.2017
Get full text
Year of Publication 14.09.2017
Patent
Multi-zone pedestal for plasma processing
Rocha-Alvarez Juan Carlos, Zhou Jianhua, Lin Xing, Yang Bozhi, Dubois Dale R, Sankarakrishnan Ramprakash
Year of Publication 08.08.2017
Get full text
Year of Publication 08.08.2017
Patent
Processing system containing an isolation region separating a deposition chamber from a treatment chamber
Sriram, Mandyam, Srinivasan, Mukund, Dubois, Dale R, Mallick, Abhijit Basu, Ponnekanti, Hari K, Rocha-Alvarez, Juan Carlos, Janakiraman, Karthik, Demos, Alexandros T
Year of Publication 19.03.2019
Get full text
Year of Publication 19.03.2019
Patent
MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING
DUBOIS DALE R, SANKARAKRISHNAN RAMPRAKASH, ROCHA-ALVAREZ JUAN CARLOS, LIN XING, YANG BOZHI, ZHOU JIANHUA
Year of Publication 07.01.2016
Get full text
Year of Publication 07.01.2016
Patent
PROCESS KIT INCLUDING FLOW ISOLATOR RING
KULKARNI Mayur G, CHUC Kien N, KIM Sungjin, GHOSH Kalyanjit, WANG Yanjie, DUBOIS Dale R, BALUJA Sanjeev
Year of Publication 27.10.2016
Get full text
Year of Publication 27.10.2016
Patent