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"DAI Xintuo"
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"DAI Xintuo"
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FULLY SELF ALIGNED VIA INTEGRATION PROCESSES
by
DAI XINTUO
Year of Publication
06.03.2023
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Communication-Copper Grain Growth and Texture Formation in Copper-Titanium Thin Films
by
Faheem, Mohammad
,
Giridharan, Rudy Ratnadurai
,
Dai
,
Xintuo
,
Vaid, Alok
Published in
ECS journal of solid state science and technology
(01.01.2017)
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FULLY SELF ALIGNED VIA INTEGRATION PROCESSES
by
DAI
,
Xintuo
Year of Publication
02.03.2023
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FULLY SELF ALIGNED VIA INTEGRATION PROCESSES
by
DAI
,
Xintuo
Year of Publication
02.03.2023
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Patent
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Fully self aligned via integration processes
by
DAI
,
XINTUO
Year of Publication
01.04.2023
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Methods for gate formation in circuit structures
by
Dai
,
Xintuo
,
Li, Jiong
Year of Publication
17.04.2018
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Methods for gate formation in circuit structures
by
Li Jiong
,
Dai Xintuo
Year of Publication
02.05.2017
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Overlay metrology system and method
by
DAI XINTUO
,
YAN BINBIN
Year of Publication
03.05.2016
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METHOD OF REMOVING CONTAMINATIONS
by
DAI
,
XINTUO
Year of Publication
28.11.2011
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METHOD OF REMOVING CONTAMINATIONS
by
DAI XINTUO
Year of Publication
27.10.2011
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Self-referencing and self-calibrating interference pattern overlay measurement
by
Chinthamanipeta Sripadarao, Pavan Kumar
,
Dai
,
Xintuo
,
Yang, Dongyue
,
Park, Dongsuk
,
Wong, Cheuk Wun
,
Tang, Minghao
,
Bellah, Md Motasim
Year of Publication
13.06.2023
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OVERLAY METROLOGY SYSTEM AND METHOD
by
DAI XINTUO
,
YAN BINBIN
Year of Publication
21.05.2015
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Preventing bridge formation between replacement gate and source/drain region through STI structure
by
Wu, Xusheng
,
Huang, Haigou
,
Dai
,
Xintuo
Year of Publication
28.08.2018
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Methods for performing a gate cut last scheme for FinFET semiconductor devices
by
Wu, Xusheng
,
Huang, Haigou
,
Dai
,
Xintuo
Year of Publication
05.06.2018
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SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY MEASUREMENT
by
Chinthamanipeta Sripadarao, Pavan Kumar
,
Dai
,
Xintuo
,
Yang, Dongyue
,
Park, Dongsuk
,
Wong, Cheuk Wun
,
Tang, Minghao
,
Bellah, Md Motasim
Year of Publication
20.10.2022
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PREVENTING BRIDGE FORMATION BETWEEN REPLACEMENT GATE AND SOURCE/DRAIN REGION THROUGH STI STRUCTURE
by
Huang Haigou
,
Wu Xusheng
,
Dai Xintuo
Year of Publication
01.02.2018
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Overlay structures
by
Dai
,
Xintuo
,
Ning, Guoxiang
,
Park, Dongsuk
,
Karakoy, Mert
Year of Publication
19.11.2019
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METHODS FOR PERFORMING A GATE CUT LAST SCHEME FOR FINFET SEMICONDUCTOR DEVICES
by
Huang Haigou
,
Wu Xusheng
,
Dai Xintuo
Year of Publication
30.11.2017
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OVERLAY STRUCTURES
by
DAI
,
Xintuo
,
PARK, Dongsuk
,
NING, Guoxiang
,
KARAKOY, Mert
Year of Publication
04.07.2019
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METHODS FOR GATE FORMATION IN CIRCUIT STRUCTURES
by
DAI Xintuo
,
LI Jiong
Year of Publication
24.08.2017
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