Method for reducing damage to corner of storage region during three-dimensional memory fabrication process
LYU ZHENYU, YAO LAN, BAO KUN, ZHU JIFENG, LI YANNI, ZHENG AMAN, DONG JINWEN, HU SIPING, XIA JI, XIAO LIHONG, CHEN JUN, ZHANG ZHONG, DAI XIAOWANG
Year of Publication 02.02.2018
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Year of Publication 02.02.2018
Patent