Search Results - "Döring, Hans-Joachim" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Precision assembly of a miniaturized wire deflector for electron-beam lithography

Precision assembly of a miniaturized wire deflector for electron-beam lithography

by Risse, Stefan, Damm, Christoph, Hornaff, Marcel, Kamm, Andreas, Mohaupt, Matthias, Eberhardt, Ramona, Schmidt, Ingo, Ramm, Roland, Kühmstedt, Peter, Notni, Gunther, Döring, Hans-Joachim, Elster, Thomas, Kirschstein, Ulf Carsten, Schenk, Christoph
Published in Microelectronic engineering (01.09.2012)

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Journal Article

Precisely Assembled Multi Deflection Arrays – Key Components for Multi Shaped Beam Lithography

Precisely Assembled Multi Deflection Arrays – Key Components for Multi Shaped Beam Lithography

by Mohaupt, Matthias, Beckert, Erik, Burkhardt, Thomas, Hornaff, Marcel, Damm, Christoph, Eberhardt, Ramona, Tünnermann, Andreas, Döring, Hans-Joachim, Reimer, Klaus
Published in Precision Assembly Technologies and Systems (2012)

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Book Chapter

System for exposure of a substrate with several individually shaped charged particle beams for high resolution lithography of structured patterns

System for exposure of a substrate with several individually shaped charged particle beams for high resolution lithography of structured patterns

by HEINITZ, JOACHIM, SLODOWSKI, MATTHIAS, ELSTER, THOMAS, DÖRING, HANS-JOACHIM
Year of Publication 07.09.2016

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Patent

MULTI-BEAM MODULATOR FOR A PARTICLE BEAM AND USE OF THE MULTI-BEAM MODULATOR FOR THE MASKLESS STRUCTURING OF A SUBSTRATE

MULTI-BEAM MODULATOR FOR A PARTICLE BEAM AND USE OF THE MULTI-BEAM MODULATOR FOR THE MASKLESS STRUCTURING OF A SUBSTRATE

by HEINITZ, JOACHIM, DÖRING, HANS-JOACHIM
Year of Publication 10.08.2016

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Patent

Device for electrostatic deflection of a particle beam

Device for electrostatic deflection of a particle beam

by Döring, Hans-Joachim, Elster, Thomas
Year of Publication 01.04.2003

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Patent

Multi-beam modulator for a particle beam and application of the multi-beam modulator for the structurization of maskless substrates

Multi-beam modulator for a particle beam and application of the multi-beam modulator for the structurization of maskless substrates

by HEINITZ, JOACHIM, DORING, HANS-JOACHIM
Year of Publication 11.03.2013

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Patent

Device to structurize a particle-radiation

Device to structurize a particle-radiation

by HEINITZ, JOACHIM, DORING, HANS-JOACHIM
Year of Publication 16.05.2006

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Patent

Multi-beam modulator for a particle beam and application of the multi-beam modulator for the structurization of maskless substrates

Multi-beam modulator for a particle beam and application of the multi-beam modulator for the structurization of maskless substrates

by HEINITZ, JOACHIM, DORING, HANS-JOACHIM
Year of Publication 16.05.2006

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Patent

Illumination system for a corpuscular radiation device and method for the illumination with a corpuscular radiation

Illumination system for a corpuscular radiation device and method for the illumination with a corpuscular radiation

by ELSTER, THOMAS, DORING, HANS-JOACHIM
Year of Publication 16.04.2006

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Patent

MULTI-BEAM MODULATOR FOR A PARTICLE BEAM AND USE OF THE MULTI-BEAM MODULATOR FOR THE MASKLESS STRUCTURING OF A SUBSTRATE

MULTI-BEAM MODULATOR FOR A PARTICLE BEAM AND USE OF THE MULTI-BEAM MODULATOR FOR THE MASKLESS STRUCTURING OF A SUBSTRATE

by HEINITZ, JOACHIM, DOERING, HANS-JOACHIM
Year of Publication 20.03.2013

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Patent

Multistrahlmodulator für einen Partikelstrahl und Verwendung des Multistrahlmodulators zur maskenlosen Substratsstrukturierung

Multistrahlmodulator für einen Partikelstrahl und Verwendung des Multistrahlmodulators zur maskenlosen Substratsstrukturierung

by HEINITZ, JOACHIM, DOERING, HANS-JOACHIM
Year of Publication 26.08.2010

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Patent

Multistrahlmodulator für einen Partikelstrahl und Verwendung des Multistrahlmodulators zur maskenlosen Substratsstrukturierung

Multistrahlmodulator für einen Partikelstrahl und Verwendung des Multistrahlmodulators zur maskenlosen Substratsstrukturierung

by HEINITZ, JOACHIM, DOERING, HANS-JOACHIM
Year of Publication 13.03.2008

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Patent

MULTI-BEAM MODULATOR FOR A PARTICLE BEAM AND USE OF THE MULTI-BEAM MODULATOR FOR THE MASKLESS STRUCTURING OF A SUBSTRATE

MULTI-BEAM MODULATOR FOR A PARTICLE BEAM AND USE OF THE MULTI-BEAM MODULATOR FOR THE MASKLESS STRUCTURING OF A SUBSTRATE

by HEINITZ, JOACHIM, DOERING, HANS-JOACHIM
Year of Publication 01.08.2007

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Patent

Anordnung zur Beleuchtung eines Substrats mit mehreren individuell geformten Partikelstrahlen zur hochauflösenden Lithographie von Strukturmustern

Anordnung zur Beleuchtung eines Substrats mit mehreren individuell geformten Partikelstrahlen zur hochauflösenden Lithographie von Strukturmustern

by HEINITZ, JOACHIM, SLODOWSKI, MATTHIAS, ELSTER, THOMAS, DOERING, HANS-JOACHIM
Year of Publication 03.05.2012

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Patent

DEVICE FOR STRUCTURING A PARTICLE BEAM

DEVICE FOR STRUCTURING A PARTICLE BEAM

by HEINITZ, JOACHIM, DOERING, HANS-JOACHIM
Year of Publication 11.05.2006

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Patent

Vorrichtung zur Strukturierung eines Partikelstrahls

Vorrichtung zur Strukturierung eines Partikelstrahls

by HEINITZ, JOACHIM, DOERING, HANS-JOACHIM
Year of Publication 11.05.2006

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Patent

MULTI-BEAM MODULATOR FOR A PARTICLE BEAM AND USE OF THE MULTI-BEAM MODULATOR FOR THE MASKLESS STRUCTURING OF A SUBSTRATE

MULTI-BEAM MODULATOR FOR A PARTICLE BEAM AND USE OF THE MULTI-BEAM MODULATOR FOR THE MASKLESS STRUCTURING OF A SUBSTRATE

by HEINITZ, JOACHIM, DOERING, HANS-JOACHIM
Year of Publication 11.05.2006

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Patent

Multistrahlmodulator für einen Partikelstrahl und Verwendung des Multistrahlmodulators zur maskenlosen Substratsstrukturierung

Multistrahlmodulator für einen Partikelstrahl und Verwendung des Multistrahlmodulators zur maskenlosen Substratsstrukturierung

by HEINITZ, JOACHIM, DOERING, HANS-JOACHIM
Year of Publication 04.05.2006

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Patent

LIGHTING SYSTEM FOR A CORPUSCULAR RADIATION DEVICE, AND METHOD FOR LIGHTING BY MEANS OF A CORPUSCULAR BEAM

LIGHTING SYSTEM FOR A CORPUSCULAR RADIATION DEVICE, AND METHOD FOR LIGHTING BY MEANS OF A CORPUSCULAR BEAM

by ELSTER, THOMAS, DOERING, HANS-JOACHIM
Year of Publication 13.04.2006

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Patent

Beleuchtungskondensor für ein Partikeloptik-Projektionssystem

Beleuchtungskondensor für ein Partikeloptik-Projektionssystem

by ELSTER, THOMAS, DOERING, HANS-JOACHIM
Year of Publication 02.03.2006

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Patent