Impact of Ferroelectric Layer Thickness on Reliability of Back‐End‐of‐Line‐Compatible Hafnium Zirconium Oxide Films
Sünbül, Ayse, Lehninger, David, Hoffmann, Raik, Olivo, Ricardo, Prabhu, Aditya, Schöne, Fred, Kühnel, Kati, Döllgast, Moritz, Haufe, Nora, Roy, Lisa, Kämpfe, Thomas, Seidel, Konrad, Eng, Lukas M.
Published in Advanced engineering materials (01.02.2023)
Published in Advanced engineering materials (01.02.2023)
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Journal Article
A Study on Imprint Behavior of Ferroelectric Hafnium Oxide Caused by High‐Temperature Annealing
Sünbül, Ayse, Lehninger, David, Lederer, Maximilian, Mähne, Hannes, Hoffmann, Raik, Bernert, Kerstin, Thiem, Steffen, Schöne, Fred, Döllgast, Moritz, Haufe, Nora, Roy, Lisa, Kämpfe, Thomas, Seidel, Konrad, Eng, Lukas M.
Published in Physica status solidi. A, Applications and materials science (01.04.2023)
Published in Physica status solidi. A, Applications and materials science (01.04.2023)
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Journal Article