(Digital Presentation) Investigation of Nanoconfined Wet Etching Mechanism Using MD Simulation
Yoshida, Yuki, Nakano, Takeo, Kumari, Sangita, Hu, Shan, D’elia, Peter
Published in ECS transactions (27.09.2024)
Published in ECS transactions (27.09.2024)
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Journal Article
WET ETCH PROCESS AND METHODS TO FORM AIR GAPS BETWEEN METAL INTERCONNECTS
D'ELIA, Peter, KUMARI, Sangita, LIU, Eric Chih-Fang, ZHANG, Henan, HU, Shan
Year of Publication 21.03.2024
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Year of Publication 21.03.2024
Patent