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Ingle, Nitin, Holm, Daniella, Zhang, Hanshen, Ma, Feiyue, Chang, Siliang, Cui, Zhenjiang
Year of Publication 11.07.2019
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Year of Publication 11.07.2019
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METAL RECESS FOR SEMICONDUCTOR STRUCTURES
Ingle, Nitin, Holm, Daniella, Zhang, Hanshen, Ma, Feiyue, Chang, Siliang, Cui, Zhenjiang
Year of Publication 11.07.2019
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Year of Publication 11.07.2019
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Metal etch in high aspect ratio features
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Year of Publication 19.04.2024
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METAL DEPOSITION AND ETCH IN HIGH ASPECT-RATIO FEATURES
CHEN, XIAOLIN C, WANG, ANCHUAN, REDDY, ROHAN PULIGORU, CUI, ZHENJIANG, WANG, BAIWEI
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Year of Publication 01.04.2024
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Selective removal of ruthenium-containing materials
CHEN, XIAOLIN C, WANG, ANCHUAN, REDDY, ROHAN PULIGORU, JAN, OLIVER, CUI, ZHENJIANG, WANG, BAIWEI
Year of Publication 01.04.2024
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Year of Publication 01.04.2024
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Metal deposition and etch in high aspect ratio features
REDDY RAVISEKHARA POCHIMIREDDY, WANG BAIWEI, WANG ANCHUAN, CUI ZHENJIANG, CHEN, XIN, C
Year of Publication 26.03.2024
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Year of Publication 26.03.2024
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On-line self-diagnosis optimization method and device for gyroscope with any configuration
LIU ZHONGHAN, LIU RUI, LIN BO, ZHOU LIANG, CUI ZHENJIANG, GUO TINGRONG, XIAO SHUAI
Year of Publication 15.03.2024
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Year of Publication 15.03.2024
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Thrust calibration method and device of on-satellite engine, electronic equipment and storage medium
LIU RUI, ZHOU LIANG, LIN BO, CUI ZHENJIANG, LYU NAN, ZHANG CHI, GUO TINGRONG
Year of Publication 15.03.2024
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Year of Publication 15.03.2024
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Metal oxide directed removal
REDDY RAVISEKHARA POCHIMIREDDY, WANG BAIWEI, WANG ANCHUAN, CUI ZHENJIANG, CHEN, XIN, C
Year of Publication 08.03.2024
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Year of Publication 08.03.2024
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Selective removal of transition metal nitride materials
REDDY RAVISEKHARA POCHIMIREDDY, WANG BAIWEI, JAIN OMID, WANG ANCHUAN, CUI ZHENJIANG, CHEN, XIN, C
Year of Publication 23.02.2024
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Year of Publication 23.02.2024
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Autonomous position keeping control method and device for coplanar installation of electric thrusters
LIU ZHONGHAN, LIU RUI, LIN BO, ZHOU LIANG, ZHANG SHIJUN, CUI ZHENJIANG, GUO TINGRONG
Year of Publication 26.01.2024
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Year of Publication 26.01.2024
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Vector mechanism angle adjusting method and device based on coplanar installation of electric thrusters
LIU RUI, ZHOU LIANG, LIN BO, ZHANG SHIJUN, CUI ZHENJIANG, GUO TINGRONG
Year of Publication 26.01.2024
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Year of Publication 26.01.2024
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Selective removal of transition metal nitride materials
CHEN, XIAOLIN C, WANG, ANCHUAN, REDDY, ROHAN PULIGORU, JAN, OLIVER, CUI, ZHENJIANG, WANG, BAIWEI
Year of Publication 11.01.2024
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Year of Publication 11.01.2024
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