Large range dual-axis micro-stage driven by electrostatic comb-drive actuators
Olfatnia, Mohammad, Cui, Leqing, Chopra, Pankaj, Awtar, Shorya
Published in Journal of micromechanics and microengineering (01.10.2013)
Published in Journal of micromechanics and microengineering (01.10.2013)
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Journal Article
Modeling and analyzing the main modes of an ultra-precision stage with lumped parameter method
Cui, Leqing, Zhu, Yu, Yang, Kaiming, Li, Xin, Yu, Dongdong
Published in 2012 Proceedings of International Conference on Modelling, Identification and Control (01.06.2012)
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Published in 2012 Proceedings of International Conference on Modelling, Identification and Control (01.06.2012)
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Push rod type wafer clamping device employing stretching of cotton rope and springs
ZHU YU, YU DONGDONG, WANG JINSONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, YIN WENSHENG, HU JINCHUN, MU HAIHUA
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Year of Publication 18.02.2015
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Wafer clamping device by utilizing spring pinch cock
ZHU YU, YU DONGDONG, WANG JINSONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, YIN WENSHENG, HU JINCHUN, MU HAIHUA
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Year of Publication 26.11.2014
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Non-contact coarse-fine motion layer positioning system and motion control method thereof
ZHU YU, SU ZHEXIN, YU DONGDONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, YIN WENSHENG, HU JINCHUN, MU HAIHUA
Year of Publication 18.06.2014
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Year of Publication 18.06.2014
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Positioning alignment apparatus of double-side driving workpiece platform without being connected by cross beam
ZHU YU, YU DONGDONG, WANG JINSONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, HU JINCHUN, YIN WENSHENG, MU HAIHUA
Year of Publication 18.06.2014
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Year of Publication 18.06.2014
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Push rod type wafer clamping device which is retractable through air cylinder
ZHU YU, YU DONGDONG, WANG JINSONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, HU JINCHUN, YIN WENSHENG, MU HAIHUA
Year of Publication 30.01.2013
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Year of Publication 30.01.2013
Patent
Wafer clamping device by utilizing spring pinch cock
ZHU YU, YU DONGDONG, WANG JINSONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, YIN WENSHENG, HU JINCHUN, MU HAIHUA
Year of Publication 16.01.2013
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Year of Publication 16.01.2013
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WAFER CLAMPING DEVICE USING THE STRETCHED THREADS AND SPRINGS
HU, JINCHUN, MU, HAIHUA, XU, DENGFENG, YIN, WENSHENG, YU, DONGDONG, ZHU, YU, WANG, JINSONG, ZHANG, MING, CUI, LEQING, LI, XIN, YANG, KAIMING
Year of Publication 03.01.2013
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Year of Publication 03.01.2013
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PUSHROD-TYPE WAFER HOLDER APPARATUS USING CYLINDER FOR RECIPROCATION
HU, JINCHUN, MU, HAIHUA, XU, DENGFENG, YIN, WENSHENG, YU, DONGDONG, ZHU, YU, WANG, JINSONG, ZHANG, MING, CUI, LEQING, LI, XIN, YANG, KAIMING
Year of Publication 03.01.2013
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Year of Publication 03.01.2013
Patent
WAFER-CLAMPING DEVICE USING SPRING CLIPS
HU, JINCHUN, MU, HAIHUA, YIN, WENSHENG, XU, DENGFENG, YU, DONGDONG, ZHU, YU, WANG, JINSONG, ZHANG, MING, CUI, LEQING, LI, XIN, YANG, KAIMING
Year of Publication 03.01.2013
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Year of Publication 03.01.2013
Patent
A WAFER HOLDING DEVICE USING A PUSHER ROD DRAWN BY STRINGS AND SPRINGS
HU, JINCHUN, MU, HAIHUA, XU, DENGFENG, YIN, WENSHENG, YU, DONGDONG, ZHU, YU, WANG, JINSONG, ZHANG, MING, CUI, LEQING, LI, XIN, YANG, KAIMING
Year of Publication 03.01.2013
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Year of Publication 03.01.2013
Patent
Wafer clamping device by utilizing spring pinch cock
ZHU YU, YU DONGDONG, WANG JINSONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, YIN WENSHENG, HU JINCHUN, MU HAIHUA
Year of Publication 24.10.2012
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Year of Publication 24.10.2012
Patent
Push rod-type wafer clamping device which extends with cylinder
ZHU YU, YU DONGDONG, WANG JINSONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, HU JINCHUN, YIN WENSHENG, MU HAIHUA
Year of Publication 17.10.2012
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Year of Publication 17.10.2012
Patent
Non-contact single-degree-of-freedom positioning device and synchronous movement control method thereof
ZHU YU, YU DONGDONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, HU JINCHUN, YIN WENSHENG, MU HAIHUA
Year of Publication 10.10.2012
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Year of Publication 10.10.2012
Patent
Non-contact coarse-fine motion layer positioning system and motion control method thereof
ZHU YU, SU ZHEXIN, YU DONGDONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, YIN WENSHENG, HU JINCHUN, MU HAIHUA
Year of Publication 10.10.2012
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Year of Publication 10.10.2012
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Planar three degree-of-freedom wafer transmitting device
ZHU YU, YU DONGDONG, WANG JINSONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, YIN WENSHENG, HU JINCHUN, MU HAIHUA
Year of Publication 03.10.2012
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Year of Publication 03.10.2012
Patent
Wafer clamping device utilizing stretching of cord spring
ZHU YU, YU DONGDONG, WANG JINSONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, HU JINCHUN, YIN WENSHENG, MU HAIHUA
Year of Publication 03.10.2012
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Year of Publication 03.10.2012
Patent
Positioning alignment apparatus of double-side driving workpiece platform without being connected by cross beam
ZHU YU, YU DONGDONG, WANG JINSONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, HU JINCHUN, YIN WENSHENG, MU HAIHUA
Year of Publication 03.10.2012
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Year of Publication 03.10.2012
Patent