Guided phase separation of polymer blend thin films on ion beam-induced pre-patterned substrates
Karade, Yogesh, Madani-Grasset, Frédéric, Berger, Rüdiger, Csiba, Vojtech, Rommel, Mathias, Dietzel, Andreas
Published in Microelectronic engineering (01.05.2010)
Published in Microelectronic engineering (01.05.2010)
Get full text
Journal Article
Conference Proceeding