2D Multiple Beam Interference Lithography
Apostol, A.D., Damian, V., Garoi, F., Iordache, Iuliana, Logofatu, P.C., Nascov, V., Sima, A., Cristea, B. Dana, Muller, Raluca
Published in 2006 International Semiconductor Conference (01.09.2006)
Published in 2006 International Semiconductor Conference (01.09.2006)
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