COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
Peters, David W, Cooke, Richard A, Hendrix, Bryan C, Waldfried, Carlo, Gunda, Nilesh, Lin, I-Kuan, Li, Weimin
Year of Publication 27.03.2019
Get full text
Year of Publication 27.03.2019
Patent
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
COOKE, Richard, A, GUNDA, Nilesh, LIN, I-Kuan, PETERS, David, W, LI, Weimin, HENDRIX, Bryan, C, WALDFRIED, Carlo
Year of Publication 17.10.2018
Get full text
Year of Publication 17.10.2018
Patent
High conductivity electrostatic chuck
Stone Lyudmila, Cooke Richard A, Suuronen David, Blake Julian, Donnell Steven, Venkatraman Chandra, Stone Dale K
Year of Publication 27.06.2017
Get full text
Year of Publication 27.06.2017
Patent
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
Cooke Richard A, Hendrix Bryan C, Gunda Nilesh, Li Weimin, Waldfried Carlo, Peters David W, Lin I-Kuan
Year of Publication 15.02.2018
Get full text
Year of Publication 15.02.2018
Patent
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
COOKE, Richard, A, GUNDA, Nilesh, LIN, I-Kuan, PETERS, David, W, LI, Weimin, HENDRIX, Bryan, C, WALDFRIED, Carlo
Year of Publication 20.12.2017
Get full text
Year of Publication 20.12.2017
Patent
ELECTROSTATIC CHUCK AND METHOD OF MAKING SAME
NEFF, Wolfram, COOKE, Richard A, KRULL, Wade, RYBCZYNSKI, Jakub, HANAGAN, Michael, WALDFRIED, Carlo
Year of Publication 14.12.2016
Get full text
Year of Publication 14.12.2016
Patent
Electrostatic Chuck and Method of Making Same
Cooke Richard A, Hanagan Michael, Neff Wolfram, Rybczynski Jakub, Krull Wade, Waldfried Carlo
Year of Publication 17.11.2016
Get full text
Year of Publication 17.11.2016
Patent
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
COOKE, Richard, A, GUNDA, Nilesh, LIN, I-Kuan, PETERS, David, W, LI, Weimin, HENDRIX, Bryan, C, WALDFRIED, Carlo
Year of Publication 28.09.2017
Get full text
Year of Publication 28.09.2017
Patent