System and method for extending a lifetime of an ion source for molecular carbon implants
Colvin, Neil K, Bassom, Neil, Sporleder, David, Ameen, Mike, Xu, Xiao
Year of Publication 12.09.2023
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Year of Publication 12.09.2023
Patent
Exemplary Ion Source for the Implanting of Halogen and Oxygen Based Dopant Gases
Tseh-Jen Hsieh, Colvin, Neil K.
Published in 2016 21st International Conference on Ion Implantation Technology (IIT) (01.09.2016)
Published in 2016 21st International Conference on Ion Implantation Technology (IIT) (01.09.2016)
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Conference Proceeding