Process control for plasma processing of polymers
Favia, P., Creatore, M., Palumbo, F., Colaprico, V., d'Agostino, R.
Published in Surface & coatings technology (01.07.2001)
Published in Surface & coatings technology (01.07.2001)
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Journal Article
Mechanisms of etching and polymerization in radiofrequency discharges of CF4–H2, CF4–C2F4, C2F6–H2, C3F8–H2
d’Agostino, R., Cramarossa, F., Colaprico, V., d’Ettole, R.
Published in Journal of applied physics (01.03.1983)
Published in Journal of applied physics (01.03.1983)
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Journal Article
Process control for plasma processing of polymers
FAVIA, P, CREATORE, M, PALUMBO, F, COLAPRICO, V, D'AGOSTINO, R
Published in Surface & coatings technology (2001)
Get full text
Published in Surface & coatings technology (2001)
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