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Year of Publication 16.11.1999
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INTERNALLY COOLED TARGET ASSEMBLY FOR MAGNETRON SPUTTERING
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Year of Publication 27.08.1998
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Year of Publication 03.06.1997
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Collimated deposition apparatus and method
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Year of Publication 18.03.1998
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Collimated deposition apparatus and method
DEMARAY; R. ERNEST, HOFFMAN; VANCE E, COCHRAN; RONALD R, PARK; YOUNG H, HELMER; JOHN C
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Year of Publication 19.07.1994
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Year of Publication 30.07.1991
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COLLIMATED DEPOSITION APPARATUS AND METHOD
HELMER, JOHN C, PARK, YOUNG HOON, DEMARAY, RICHARD ERNEST, HOFFMAN, VANCE EBER JR, COCHRAN, RONALD R
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Year of Publication 29.01.1992
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Collimated deposition apparatus and method
HELMER, JOHN C, PARK, YOUNG HOON, DEMARAY, RICHARD ERNEST, HOFFMAN, VANCE EBER JR, COCHRAN, RONALD R
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Year of Publication 07.08.1991
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Rotating sputtering apparatus for selected erosion
COCHRAN; RONALD R, PARK; YOUNG H, HOFFMAN, JR.; VANCE E, HELMER; JOHN C, DEMARAY; RICHARD E, ANDERSON; ROBERT L
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Year of Publication 12.10.1993
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ROTATING SPUTTERING APPARATUS FOR SELECTED EROSION
HELMER, JOHN C, PARK, YOUNG HOON, DEMARAY, RICHARD ERNEST, ANDERSON, ROBERT L, HOFFMAN, VANCE EBER JR, COCHRAN, RONALD R
Year of Publication 15.01.1992
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Year of Publication 15.01.1992
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Rotating sputtering apparatus for selected erosion
HELMER, JOHN C, PARK, YOUNG HOON, DEMARAY, RICHARD ERNEST, ANDERSON, ROBERT L, HOFFMAN, VANCE EBER JR, COCHRAN, RONALD R
Year of Publication 31.07.1991
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Year of Publication 31.07.1991
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Internally cooled target assembly for magnetron sputtering
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Year of Publication 01.09.1999
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Year of Publication 01.09.1999
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Gerät und Verfahren zur Niederschlagung durch einen Kollimator
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Year of Publication 02.07.1998
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Year of Publication 02.07.1998
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