Search Results - "Cluster tools" :: K.UTB vyhledávací portál

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Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints

by Wang, Jufeng, Liu, Chunfeng, Zhou, MengChu, Abusorrah, Abdullah
Published in IEEE transactions on automation science and engineering (2025)

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Control laws synthesis for timed event graphs subject to generalised marking constraints by Min-Plus algebra: application to cluster tools

by Rajah, J., Tebani, K., Amari, S., Barkallah, M., Haddar, M.
Published in International journal of control (03.05.2024)

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Scheduling Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Wafer Residency Time Constraints

by Huang, BaoYing, Wu, NaiQi, Qiao, Yan, Guo, WeiWen
Published in IEEE transactions on automation science and engineering (01.01.2025)

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Kanban Feedback Control for Wafer Delay Regulation of Cluster Tools

by Roh, Dong-Hyun, Lee, Tae-Eog, Martinez, Claude
Published in IEEE transactions on automation science and engineering (01.01.2025)

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Closing-Down Optimization for Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints

by Qiao, Yan, Zhou, Mengchu, Wu, Naiqi, Li, Zhiwu, Zhu, Qinghua
Published in IEEE transactions on systems, man, and cybernetics. Systems (01.11.2021)

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Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time Constraints and Bounded Activity Time Variation

by Qiao, Yan, Wu, NaiQi, Zhou, MengChu
Published in IEEE transactions on automation science and engineering (01.07.2012)

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Collaborative Scheduling for Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Chamber Cleaning Requirements

by Huang, BaoYing, Song, TaiRan, Wu, NaiQi, Qiao, Yan
Published in IEEE transactions on systems, man, and cybernetics. Systems (01.10.2024)

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Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints

by Qiao, Yan, Pan, Chun-Rong, Wu, Nai-Qi, Zhou, MengChu
Published in IEEE transactions on automation science and engineering (01.07.2015)

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Bi-objective optimization for scheduling of single-arm cluster tools with activity time variation

by Zeng, Shan, Wu, NaiQi, Qiao, Yan
Published in Expert systems with applications (01.08.2025)

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Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations

by Yu, Tae-Sun, Kim, Hyun-Jung, Lee, Tae-Eog
Published in IEEE transactions on automation science and engineering (01.04.2018)

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Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints

by Gu, Lei, Wu, Naiqi, Qiao, Yan, Zhang, Siwei, Li, Tan
Published in Applied sciences (01.10.2024)

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Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation

by Qiao, Yan, Wu, NaiQi, Yang, FaJun, Zhou, MengChu, Zhu, QingHua
Published in IEEE transactions on systems, man, and cybernetics. Systems (01.04.2018)

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Feedback Control of Cluster Tools: Stability Against Random Time Disruptions

by Kim, Chulhan, Yu, Tae-Sun, Lee, Tae-Eog
Published in IEEE transactions on automation science and engineering (01.07.2022)

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Scheduling Lot Switching Operations for Cluster Tools

by Lee, Jun-Ho, Kim, Hyun-Jung, Lee, Tae-Eog
Published in IEEE transactions on semiconductor manufacturing (01.11.2013)

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Feedback Control of Cluster Tools for Regulating Wafer Delays

by Kim, Chulhan, Lee, Tae-Eog
Published in IEEE transactions on automation science and engineering (01.04.2016)

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Wafer Residency Time Analysis for Time-Constrained Single-Robot-Arm Cluster Tools With Activity Time Variation

by Yang, Fajun, Tang, Xin, Wu, Naiqi, Zhang, Chunjiang, Gao, Liang
Published in IEEE transactions on control systems technology (01.07.2020)

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Wafer sojourn time fluctuation analysis for time-constrained dual-arm multi-cluster tools with activity time variation

by Yang, Fajun, Wu, Naiqi, Qiao, Yan, Su, Rong, Zhang, Chunjiang
Published in International journal of computer integrated manufacturing (03.08.2021)

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Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools

by Zhu, QingHua, Zhou, MengChu, Qiao, Yan, Wu, NaiQi
Published in IEEE transactions on systems, man, and cybernetics. Systems (01.03.2018)

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Schedulability Analysis for Noncyclic Operation of Time-Constrained Cluster Tools With Time Variation

by Kim, Hyun-Jung, Lee, Jun-Ho, Lee, Tae-Eog
Published in IEEE transactions on automation science and engineering (01.07.2016)

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Post-processing time-aware optimal scheduling of single robotic cluster tools

by Zhu, QingHua, Qiao, Yan, Wu, NaiQi, Hou, Yan
Published in IEEE/CAA journal of automatica sinica (01.03.2020)

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