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High volume semiconductor manufacturing using nanoimprint lithography
Hamaya, Zenichi, Seki, Junichi, Asano, Toshiya, Sakai, Keita, Aghili, Ali, Mizuno, Makoto, Choi, Jin, Jones, Chris
Year of Publication 03.10.2018
Year of Publication 03.10.2018
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Conference Proceeding
Progress in nanoimprint wafer and mask systems for high volume semiconductor manufacturing
Imoto, Kohei, Hiura, Mitsuru, Morohoshi, Hiroshi, Hayashi, Tatsuya, Kimura, Atsushi, Suzaki, Yoshio, Choi, Jin
Year of Publication 16.10.2017
Year of Publication 16.10.2017
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Conference Proceeding
Methods and apparatus for calibrating flow controllers in substrate processing systems
XU MING, BUCKIUS DUC, CRUSE JAMES P, DARAN BERRIN, GREGOR MARIUSCH, COBB CORIE LYNN, NGUYEN ANDREW, LANE JOHN W
Year of Publication 29.04.2014
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Year of Publication 29.04.2014
Patent
Wet clean system design
ROSATO JOHN J, LESTER PAUL, BAIYA EVANSON G, CARLSON CHARLES, RICE MIKE, MEYER SCOTT, HUDGENS JEFFREY, PAPANU JAMES S, ATKINS WYLAND L, RICHARDS DOUGLAS, KANKANALA PENCHALA, PREDOAICA CONSTANTIN
Year of Publication 13.04.2010
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Year of Publication 13.04.2010
Patent
WET CLEAN SYSTEM DESIGN
ROSATO JOHN J, LESTER PAUL, BAIYA EVANSON G, CARLSON CHARLES, RICE MIKE, MEYER SCOTT, HUDGENS JEFFREY, PAPANU JAMES S, ATKINS WYLAND L, RICHARDS DOUGLAS, KANKANALA PENCHALA, PREDOAICA CONSTANTIN
Year of Publication 10.07.2008
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Year of Publication 10.07.2008
Patent
WET CLEAN SYSTEM DESIGN
KANKANALA, PENCHALA N, HUDGENS, JEFFREY C, CARLSON, CHARLES, BAIYA, EVANSON G, LESTER, PAUL E, ATKINS, WYLAND L, RICE, MICHAEL R, PREDOAICA, CONSTANTIN, RICHARDS, DOUGLAS, PAPANU, JAMES S, MEYER, SCOTT, ROSATO, JOHN J
Year of Publication 17.07.2008
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Year of Publication 17.07.2008
Patent
Automated test and characterization web services
BALLINTINE PAUL RONALD, SARMIENTO JAIME, KU TINA PAI-LIN, KRISHNAIAH-FELTON ROOPA, SMITH DUANE, HSU GEAN
Year of Publication 15.07.2008
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Year of Publication 15.07.2008
Patent
WET CLEAN SYSTEM DESIGN
KANKANALA, PENCHALA N, HUDGENS, JEFFREY C, CARLSON, CHARLES, BAIYA, EVANSON G, LESTER, PAUL E, ATKINS, WYLAND L, RICE, MICHAEL R, PREDOAICA, CONSTANTIN, RICHARDS, DOUGLAS, PAPANU, JAMES S, MEYER, SCOTT, ROSATO, JOHN J
Year of Publication 09.10.2008
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Year of Publication 09.10.2008
Patent
METHODS AND APPARATUS FOR CALIBRATING FLOW CONTROLLERS IN SUBSTRATE PROCESSING SYSTEMS
DARAN, BERRIN, CRUSE, JAMES P, NGUYEN, ANDREW, XU, MING, COBB, CORIE LYNN, LANE, JOHN W, GREGOR, MARIUSCH, BUCKIUS, DUC
Year of Publication 01.03.2012
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Year of Publication 01.03.2012
Patent
METHODS AND APPARATUS FOR CALIBRATING FLOW CONTROLLERS IN SUBSTRATE PROCESSING SYSTEMS
XU MING, BUCKIUS DUC, CRUSE JAMES P, DARAN BERRIN, GREGOR MARIUSCH, COBB CORIE LYNN, NGUYEN ANDREW, LANE JOHN W
Year of Publication 03.11.2011
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Year of Publication 03.11.2011
Patent
METHODS AND APPARATUS FOR CALIBRATING FLOW CONTROLLERS IN SUBSTRATE PROCESSING SYSTEMS
DARAN, BERRIN, CRUSE, JAMES P, NGUYEN, ANDREW, XU, MING, COBB, CORIE LYNN, LANE, JOHN W, GREGOR, MARIUSCH, BUCKIUS, DUC
Year of Publication 03.11.2011
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Year of Publication 03.11.2011
Patent