Device-design metrics to improve manufacturability
Peterson, Kirk, Logan, Ron, Xiaojun Yu, Dezfulian, Kevin, Bazan, Greg, Winslow, Jon, Zamdmer, Noah, Dubuque, Lenny, Walsh, Brian, Norfleet, Andrew, Clougherty, Fran, Bayat, Ben, Mocuta, Anda, Rim, Ken
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
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