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Year of Publication 02.06.2023
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Year of Publication 02.06.2023
Patent
A Study of Metal on Metal Multiple Patterning Scheme
Chen, James Hsueh-Chung, Silvestre, Mary-Claire, Ghosh, Somnath, Mignot, Yann, Kelly, James J., Clevenger, Lawrence A., Spooner, Terry A.
Published in 2020 IEEE International Interconnect Technology Conference (IITC) (05.10.2020)
Published in 2020 IEEE International Interconnect Technology Conference (IITC) (05.10.2020)
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Conference Proceeding
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Year of Publication 02.11.2011
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Year of Publication 02.11.2011
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ANISOTROPIC STRESS GENERATION BY STRESS-GENERATING LINERS HAVING A SUBLITHOGRAPHIC WIDTH
DORIS BRUCE B, HUANG ELBERT E, RADENS CARL J, CLEVENGER LAWRENCE A, PURUSHOTHAMAN SAMPATH
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Year of Publication 23.11.2010
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CORRUGATED INTERFACES FOR MULTILAYERED INTERCONNECTS
HUANG ELBERT E, RADENS CARL J, CLEVENGER LAWRENCE A, PURUSHOTHAMAN SAMPATH, DALTON TIMOTHY J
Year of Publication 10.06.2010
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Year of Publication 10.06.2010
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SELF-ALIGNED NANO-SCALE DEVICE WITH PARALLEL PLATE ELECTRODES
RADENS CARL JOHN, PETRARCA KEVIN S, SAPP BRIAN CHRISTOPHER, QUON ROGER ALLAN, CLEVENGER LAWRENCE A, LI ZHENGWEN
Year of Publication 30.12.2010
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Year of Publication 30.12.2010
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LOW TEMPERATURE FORMATION OF LOW RESISTIVITY TITANIUM SILICIDE
MANN, RANDY W, MILES, GLEN L, HARPER, JAMES M.E, CABRAL JR., CYRIL, D'HEURLE, FRANCOIS M, CLEVENGER, LAWRENCE A, RAKOWSKI, DONALD W
Year of Publication 16.11.1998
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Year of Publication 16.11.1998
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SKIP VIA WITH DISCONTINUOUS DIELECTRIC CAP
Clevenger, Lawrence A, Lanzillo, Nicholas Anthony, Xie, Ruilong, Motoyama, Koichi
Year of Publication 20.06.2024
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Year of Publication 20.06.2024
Patent
SKIP VIA WITH LATERAL LINE CONNECTION
Clevenger, Lawrence A, Lanzillo, Nicholas Anthony, Xie, Ruilong, Motoyama, Koichi
Year of Publication 11.04.2024
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Year of Publication 11.04.2024
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