Super-Resolution Fluorescence Imaging for Semiconductor Nanoscale Metrology and Inspection
Nguyen, Duyen Thi, Mun, Seohyun, Park, HyunBum, Jeong, Uidon, Kim, Geun-ho, Lee, Seongsil, Jun, Chung-Sam, Sung, Myung Mo, Kim, Doory
Published in Nano letters (28.12.2022)
Published in Nano letters (28.12.2022)
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Journal Article
Determination of the Absolute Thickness of Ultrathin Al2O3 Overlayers on Si (100) Substrate
Kim, Kyung Joong, Jang, Jong Shik, Lee, Joo-Hee, Jee, Yun-Jung, Jun, Chung-Sam
Published in Analytical chemistry (Washington) (15.10.2009)
Published in Analytical chemistry (Washington) (15.10.2009)
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Journal Article
Characterization of residual implant damage by generation time technique
Jee, Yun-Jung, Kim, Chun-Yong, Jun, Chung-Sam, Kim, Tae-Sung, Belyaev, Anton, Marinskiy, Dmitriy
Published in Solid-state electronics (01.04.2013)
Published in Solid-state electronics (01.04.2013)
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Journal Article
The Development of the Non-contact Electrical Leakage Property Measurement System for the High-K Dielectric Materials on DRAM Capacitors
Yusin Yang, Byung Sug Lee, Misung Lee, Chung Sam Jun, Tae Sung Kim
Published in The 17th Annual SEMI/IEEE ASMC 2006 Conference (2006)
Published in The 17th Annual SEMI/IEEE ASMC 2006 Conference (2006)
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Conference Proceeding
Fast, exact, and non-destructive diagnoses of contact failures in nano-scale semiconductor device using conductive AFM
Shin, ChaeHo, Kim, Kyongjun, Kim, JeongHoi, Ko, Wooseok, Yang, Yusin, Lee, SangKil, Jun, Chung Sam, Kim, Youn Sang
Published in Scientific reports (28.06.2013)
Published in Scientific reports (28.06.2013)
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Journal Article
7.9 1/2.74-inch 32Mpixel-Prototype CMOS Image Sensor with 0.64μ m Unit Pixels Separated by Full-Depth Deep-Trench Isolation
Park, JongEun, Park, Sungbong, Cho, Kwansik, Lee, Taehun, Lee, Changkyu, Kim, DongHyun, Lee, Beomsuk, Kim, SungIn, Ji, Ho-Chul, Im, DongMo, Park, Haeyong, Kim, Jinyoung, Cha, JungHo, Kim, Taehoon, Joe, In-Sung, Hong, Soojin, Chang, Chongkwang, Kim, Jingyun, Shim, WooGwan, Kim, Taehee, Lee, Jamie, Park, Donghyuk, Kim, EuiYeol, Park, Howoo, Lee, Jaekyu, Kim, Yitae, Ahn, JungChak, Hong, YoungKi, Jun, ChungSam, Kim, HyunChul, Moon, Chang-Rok, Kang, Ho-Kyu
Published in 2021 IEEE International Solid- State Circuits Conference (ISSCC) (13.02.2021)
Published in 2021 IEEE International Solid- State Circuits Conference (ISSCC) (13.02.2021)
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Conference Proceeding
Small angle x-ray scattering (SAXS) and Q-space weighting filter for ×3 CD-extraction accuracy improvement
Tsuji, Yukihide, Kim, Doyun, Yoo, Gwangsu, Hwang, ByungHyun, Kim, Kwanghoon, Lee, Donhwan, Sasai, Yoshinori, Yi, Shinwook, Jeong, Jaehoon, Ihm, Dongchul, Jun, ChungSam, Kim, Dae Sin
Published in AIP advances (01.06.2021)
Published in AIP advances (01.06.2021)
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Journal Article
Automatic defect classification using boosting
Sang Hwa Lee, Hong Il Kim, Nam Ik Cho, Yu Han Jeong, Ki Suk Chung, Chung Sam Jun
Published in Fourth International Conference on Machine Learning and Applications (ICMLA'05) (2005)
Published in Fourth International Conference on Machine Learning and Applications (ICMLA'05) (2005)
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Conference Proceeding
Development of automated contact inspection system using in-line CD SEM
Sang-Mun Chon, Sang-Bong Choi, Yong-Wan Kim, Kye-Weon Kim, Kyu-Hong Lim, Sun-Yong Choi, Chung-Sam Jun
Published in 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) (2001)
Published in 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) (2001)
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Conference Proceeding
Method of inspecting surface and method of manufacturing semiconductor device
Jee, Yun-jung, Yang, Yu-sin, Ryu, Sung-yoon, Song, Gil-woo, Jun, Chung-sam
Year of Publication 22.06.2021
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Year of Publication 22.06.2021
Patent
SEMICONDUCTOR DEVICE MEASURING DEVICE AND METHOD FOR MEASURING SEMICONDUCTOR DEVICE
YOON, Da Hee, LEE, Dong-Ryul, JUN, Chung Sam, BYUN, Jung Hoon, LEE, Woo Yun, RYOO, Hyun Woo, IHM, Dong Chul
Year of Publication 30.03.2023
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Year of Publication 30.03.2023
Patent
METHOD OF INSPECTING SURFACE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Jee, Yun-jung, Yang, Yu-sin, RYU, Sung-yoon, Song, Gil-woo, Jun, Chung-sam
Year of Publication 25.06.2020
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Year of Publication 25.06.2020
Patent
Defect inspection method and defect inspection apparatus
Ryu, Sung-Yoon, Jun, Chung-Sam, Jee, Yun-Jung, Yang, Yu-Sin, Song, Joon-Seo
Year of Publication 17.03.2020
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Year of Publication 17.03.2020
Patent
Si Crystallization Monitoring Using EBSD Technique
Youngjee Yoon, Jungtaek Lim, ChungSam Jun
Published in The 17th Annual SEMI/IEEE ASMC 2006 Conference (2006)
Published in The 17th Annual SEMI/IEEE ASMC 2006 Conference (2006)
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Conference Proceeding
Scanning probe inspector
Jun, Chung Sam, Sohn, Young Hoon, Oh, Duck Mahn, Ryu, Sung Yoon, Jee, Yun Jung
Year of Publication 10.03.2020
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Year of Publication 10.03.2020
Patent
METHOD OF INSPECTING SURFACE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
YANG, Yu-sin, SONG, Gil-woo, RYU, Sung-yoon, JEE, Yun-jung, JUN, Chung-sam
Year of Publication 11.07.2019
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Year of Publication 11.07.2019
Patent