Common Source Line-to-Word Line Short Improvement by Eliminating SLT Sidewall Notch in 3D NAND Deep Trench Patterning
Chung, Yao-An, Chu, Yuan-Chieh, Chang, Chih-Chin, Lee, Hong-Ji, Lian, Nan-Tzu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
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Conference Proceeding
Post-Etch Yield Killer Defects in 3D NAND High Aspect Ratio Etching Process
Chang, Chih-Chin, Hsiao, Ching-Hung, Chen, Yi-Che, Wang, Ching-Hung, Chung, Yao-An, Wang, Li-Wei, Lee, Hong-Ji, Lian, Nan-Tzu, Lee, Shih-Chin, Han, Tzung-Ting, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
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Conference Proceeding
Novel hybrid 3D NAND flash memory containing vertical-gate and gate-all-around structures
Chung, Yao-An, Yang, Zusing, Chiu, Yuan-Chieh, Hong, Shih-Ping, Lee, Hong-Ji, Lian, Nan-Tzu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
Study of Plasma Arcing Mechanism in High Aspect Ratio Slit Trench Etching
Chung, Yao-An, Lung, Cheng-Yi, Chiu, Yuan-Chieh, Lee, Hong-Ji, Lian, Nan-Tzu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
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Conference Proceeding
Synthesis and Properties of the Low Resistivity TiSi2 Nanowires Grown with TiF4 Precursor
Chang, Che-Ming, Chang, Yu-Cheng, Chung, Yao-An, Lee, Chung-Yang, Chen, Lih-Juann
Published in Journal of physical chemistry. C (15.10.2009)
Published in Journal of physical chemistry. C (15.10.2009)
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Journal Article
Pre-Epitaxial Plasma Etch Treatment for the Selective Epitaxial Growth of Silicon in High Aspect Ratio 3D NAND Memory
Lung, Cheng-Yi, Chung, Yao-An, Wu, Ming-Tsung, Lee, Hong-Ji, Lian, Nan-Tzu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
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Conference Proceeding
Pattern dependent plasma charging effect in high aspect ratio 3D NAND architecture
Yang, Zusing, Chung, Yao-An, Chang, Sheng-Yuan, Lee, Hong-Ji, Lian, Nan-Tzu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih Yuan
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
Reactive template assisted growth of one-dimensional nanostructures of titanium dioxide
Chung, Yao-An, Lee, Chi-Young, Peng, Chih-Wei, Chiu, Hsin-Tien
Published in Materials chemistry and physics (10.12.2006)
Published in Materials chemistry and physics (10.12.2006)
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Journal Article
Method for fabricating memory device
Liao, Ting-Feng, Chiu, Yuan-Chieh, Liu, Kuang-Wen, Chung, Yao-An, Chen, Kuang-Chao
Year of Publication 21.05.2024
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Year of Publication 21.05.2024
Patent
METHOD FOR FABRICATING MEMORY DEVICE
Liao, Ting-Feng, Chiu, Yuan-Chieh, Liu, Kuang-Wen, Chung, Yao-An, Chen, Kuang-Chao
Year of Publication 10.03.2022
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Year of Publication 10.03.2022
Patent
Memory device and method for fabricating the same
Liao, Ting-Feng, Chiu, Yuan-Chieh, Liu, Kuang-Wen, Chung, Yao-An, Chen, Kuang-Chao
Year of Publication 28.12.2021
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Year of Publication 28.12.2021
Patent
MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
CHUNG, YAO-AN, Liao, Ting-Feng, Chiu, Yuan-Chieh, Liu, Kuang-Wen, Chen, Kuang-Chao
Year of Publication 01.07.2021
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Year of Publication 01.07.2021
Patent