Control of Properties of Diamond-Like Silicon–Carbon Films
Popov, A. I., Barinov, A. D., Emets, V. M., Chukanova, T. S., Shupegin, M. L.
Published in Physics of the solid state (01.10.2020)
Published in Physics of the solid state (01.10.2020)
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Journal Article
Field-Frequency Variation during Plasma-Chemical Deposition of Silicon–Carbon Films as a Method for Their Structural Modification
Popov, A. I., Barinov, A. D., Yemets, V. M., Presnyakov, M. Yu, Chukanova, T. S.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.10.2023)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.10.2023)
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Journal Article
The Effect of Transition Metals on the Dielectric Properties of Diamond-Like Silicon–Carbon Films
Popov, A. I., Barinov, A. D., Emets, V. M., Arta, R. A. Kastro, Kolobov, A. V., Kononov, A. A., Ovcharov, A. V., Chukanova, T. S.
Published in Physics of the solid state (01.02.2022)
Published in Physics of the solid state (01.02.2022)
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Journal Article
Effect of Aluminum on the Structure and Electrical Properties of Amorphous Diamond-Like Silicon-Carbon Films
Popov, A. I., Barinov, A. D., Yemets, V. M., Zezin, D. A., Chukanova, T. S., Afanas’ev, V. P., Semenov-Shefov, M. A., Terekhov, V. A., Domashevskaya, E. P., Presnyakov, M. Yu, Shapetina, M. A.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.12.2023)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.12.2023)
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Journal Article
Effect of Precursor on the Dielectric Properties of Diamond-Like Silicon–Carbon Films
Barinov, A. D., Gurinovich, T. D., Popov, A. I., Chukanova, T. S., Shapetina, M. A., Shupegin, M. L.
Published in Inorganic materials (01.08.2020)
Published in Inorganic materials (01.08.2020)
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Journal Article