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Published in Thin solid films (01.11.2013)
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Photoresist ashing technology using N2/O2 ferrite-core ICP in the dual damascene process
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Published in Journal of materials science (01.08.2006)
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PROJECTION DEVICE AND ELECTRONIC DEVICE COMPRISING SAME
CHO, Si Hyung, JOO, Seung Min, CHOI, Dae Kyu, KIM, Sung Joo, HONG, Ji Yoon
Year of Publication 24.10.2024
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Year of Publication 24.10.2024
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Photoresist ashing in nitrogen gas using ferrite core inductively coupled plasmas
Kim, Hyoun Woo, Myung, Ju Hyun, Kim, Nam Ho, Chung, Chin Wook, Park, Wan Jae, Kang, Chang-Jin, Yoo, Chung-Gon, Choi, Dae-Kyu
Published in Vacuum (14.10.2005)
Published in Vacuum (14.10.2005)
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