Criteria for versatile GaN MOVPE tool: high growth rate GaN by atmospheric pressure growth
Matsumoto, Koh, Ikenaga, Kazutada, Yamamoto, Jun, Naito, Kazuki, Yano, Yoshiki, Ubukata, Akinori, Tokunaga, Hiroki, Arimura, Tadanobu, Cho, Katsuaki, Tabuchi, Toshiya, Yamaguchi, Akira, Harada, Yasuhiro, Ban, Yuzaburo, Uchiyama, Kousuke
Published in Journal of semiconductors (2011)
Published in Journal of semiconductors (2011)
Get full text
Journal Article