SEMICONDUCTOR DEVICE
KANG JUNGOO, LEE JIN SU, AHN SANGHYUCK, CHAE HONGSIK, CHO GIHEE, LEE HYUN SUK
Year of Publication 14.07.2023
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Year of Publication 14.07.2023
Patent
Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases
Cho, Gihee, Rhee, Shi-Woo
Published in ECS journal of solid state science and technology (01.01.2014)
Published in ECS journal of solid state science and technology (01.01.2014)
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Journal Article
A SEMICONDUCTOR DEVICE AND A METHOD OF FABRICATING OF THE SAME
KANG JUNGOO, LEE JIN SU, KANG SANGYEOL, KIM TAEKYUN, AHN SANGHYUCK, CHAE HONGSIK, CHO GIHEE, PARK JIWOON, LEE HYUN SUK
Year of Publication 08.02.2022
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Year of Publication 08.02.2022
Patent
SEMICONDUCTOR DEVICE
Ahn, Sanghyuck, Cho, Gihee, Chae, Hongsik, Lee, Hyun-Suk, Kang, Jungoo, Lee, Jin-Su
Year of Publication 04.04.2024
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Year of Publication 04.04.2024
Patent