Characterization of non-amine-based post-copper chemical mechanical planarization cleaning solution
Manivannan, Ramachandran, Cho, Byoung-Jun, Hailin, Xiong, Ramanathan, Srinivasan, Park, Jin-Goo
Published in Microelectronic engineering (25.06.2014)
Published in Microelectronic engineering (25.06.2014)
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Journal Article
Conference Proceeding
On the mechanism of material removal by fixed abrasive lapping of various glass substrates
Cho, Byoung-Jun, Kim, Hyuk-Min, Manivannan, R., Moon, Deog-Ju, Park, Jin-Goo
Published in Wear (01.04.2013)
Published in Wear (01.04.2013)
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Journal Article
Conference Proceeding
Investigation of cu-BTA complex formation during Cu chemical mechanical planarization process
Cho, Byoung-Jun, Shima, Shohei, Hamada, Satomi, Park, Jin-Goo
Published in Applied surface science (30.10.2016)
Published in Applied surface science (30.10.2016)
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Journal Article
Fabrication of high performance copper-resin lapping plate for sapphire: A combined 2-body and 3-body diamond abrasive wear on sapphire
Pyun, Hae-Jung, Purushothaman, Muthukrishnan, Cho, Byoung-Jun, Lee, Jung-Hwan, Park, Jin-Goo
Published in Tribology international (01.04.2018)
Published in Tribology international (01.04.2018)
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Journal Article
Selection and Optimization of Corrosion Inhibitors for Improved Cu CMP and Post-Cu CMP Cleaning
Ryu, Heon-Yul, Cho, Byoung-Jun, Yerriboina, Nagendra Prasad, Lee, Chan-Hee, Hwang, Jun-Kil, Hamada, Satomi, Wada, Yutaka, Hiyama, Hirokuni, Park, Jin-Goo
Published in ECS journal of solid state science and technology (2019)
Published in ECS journal of solid state science and technology (2019)
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Journal Article
Comparison between sapphire lapping processes using 2-body and 3-body modes as a function of diamond abrasive size
Kim, Hyuk-Min, Park, Gun-Ho, Seo, Young-Gil, Moon, Deog-Ju, Cho, Byoung-Jun, Park, Jin-Goo
Published in Wear (01.05.2015)
Published in Wear (01.05.2015)
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Journal Article
Abrasive and additive interactions in high selectivity STI CMP slurries
Praveen, B.V.S., Manivannan, R., Umashankar, T.D., Cho, Byoung-Jun, Park, Jin-Goo, Ramanathan, S.
Published in Microelectronic engineering (01.02.2014)
Published in Microelectronic engineering (01.02.2014)
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Journal Article
Effect of Silicon Dioxide Hardness on Scratches in Interlevel Dielectric Chemical-Mechanical Polishing
Kwon, Tae-Young, Cho, Byoung-Jun, Venktesh, R. Prasanna, Ramachandran, Manivannan, Kim, Hyuk-Min, Hong, Chang-Ki, Park, Jin-Goo
Published in Tribology transactions (04.03.2014)
Published in Tribology transactions (04.03.2014)
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Journal Article
CMP Defects; Their Detection and Analysis on Root Causes
Park, Jin-Goo, Kwon, Tae-Young, Venkatesh, R. P., Cho, Byoung-Jun
Published in ECS transactions (16.03.2012)
Published in ECS transactions (16.03.2012)
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Journal Article