Phase Composition and Surface Morphology of Thin AlN Films Obtained trough Magnetron Sputtering
Baranova, L. V., Strunin, V. I., Baysova, B. T., Chirikov, N. A.
Published in High energy chemistry (01.10.2023)
Published in High energy chemistry (01.10.2023)
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Journal Article
The mechanical stresses in the molybdenum films formed by magnetron sputtering on a sitall substrate
Strunin, V I, Zeema, V N, Chirikov, N A, Kozlov, A G
Published in Journal of physics. Conference series (01.08.2019)
Published in Journal of physics. Conference series (01.08.2019)
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Journal Article
Peculiarities of the Processing of Polycrystalline AlN Films on Glass-Ceramic and Si Substrates by Argon Cluster Ions
Nikolaev, I. V., Korobeishchikov, N. G., Geydt, P. V., Chirikov, N. A., Strunin, V. I.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.08.2022)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.08.2022)
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Journal Article
An Influence of an Electrode Configuration on Electrical Parameters of a Microelectronic Bulk Acoustic Wave Resonator with a Bragg Reflector
Zhilin, N. M., Ulaeva, T. N., Chirikov, N. A., Kozlov, A. G.
Published in 2024 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) (03.06.2024)
Published in 2024 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) (03.06.2024)
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Conference Proceeding
A Study of a Temperature Effect on Characteristics of a Solidly Mounted Resonator Based on AlN, Al, Mo and Ti Thin Films
Ulaeva, T. N., Zhilin, N. M., Chirikov, N. A., Strunin, V. I.
Published in 2024 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) (03.06.2024)
Published in 2024 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) (03.06.2024)
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Conference Proceeding
Investigation of Temperature Effect on Electrical Characteristics of Solidly Mounted Resonator
Torgash, T. N., Chirikov, N. A., Kozlov, A. G., Strunin, V. I.
Published in 2022 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) (30.05.2022)
Published in 2022 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) (30.05.2022)
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Conference Proceeding
Analysis of Ladder Filters based on Solidly Mounted Resonators with Aluminum Nitride Thin Film
Torgash, T. N., Kozlov, A.G., Chirikov, N. A., Strunin, V.I.
Published in 2021 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) (31.05.2021)
Published in 2021 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) (31.05.2021)
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Conference Proceeding
The Influence of Adhesion Layers in the Bragg Reflector on the Electrical Characteristics of a Thin-Film BAW Solidly Mounted Resonators
Torgash, T. N., Kozlov, A. G., Strunin, V. I., Chirikov, N. A.
Published in 2019 Dynamics of Systems, Mechanisms and Machines (Dynamics) (01.11.2019)
Published in 2019 Dynamics of Systems, Mechanisms and Machines (Dynamics) (01.11.2019)
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Conference Proceeding