A maskless post-CMOS bulk micromachining process and its application
Dai, Ching-Liang, Chiou, Jing-Hung, Lu, Michael Shiang-Cheng
Published in Journal of micromechanics and microengineering (01.12.2005)
Published in Journal of micromechanics and microengineering (01.12.2005)
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Journal Article
Capacitive micro pressure sensors with underneath readout circuit using a standard CMOS process
Dai, Ching-Liang, Chang, Shih-Chen, Lee, Chi-Yuan, Cheng, Ying-Chou, Chang, Chien-Liu, Chiou, Jing-Hung, Chang, Pei-Zen
Published in Journal of the Chinese Institute of Engineers (01.03.2003)
Published in Journal of the Chinese Institute of Engineers (01.03.2003)
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Journal Article
Structure for measuring the etching speed
Chiou, Jing-Hung, Yen, Kai-Hsiang, Wang, Chin-Horng, Liang, Chao-Chiun, Chen, Stella Y. H
Year of Publication 24.04.2007
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Year of Publication 24.04.2007
Patent
Structure for measuring the etching speed
YEN KAI-HSIANG, CHEN STELLA Y. H, LIANG CHAOIUN, WANG CHIN-HORNG, CHIOU JING-HUNG
Year of Publication 24.04.2007
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Year of Publication 24.04.2007
Patent
Fabrication method for microstructures with high aspect ratios
Kuo, Nai-Hao, Yen, Kai-Hsiang, Chiou, Jing-Hung, Tsai, Po-Hao, Lee, Yuh-Wen
Year of Publication 24.10.2006
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Year of Publication 24.10.2006
Patent