VERFAHREN ZUR SELBSTAUSRICHTUNG EINER DAMASCENEN GATTERSTRUKTUR ZU ISOLATIONSGEBIETEN
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Year of Publication 15.08.2008
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Year of Publication 15.08.2008
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Method of self-aligning a damascene gate structure to isolation regions
NIEH, CHESTER, YEN, DANIEL, CHUNG, CHING-THIAM, CHENG, WEI HUA, LEE, TONG BOON
Year of Publication 16.07.2008
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Year of Publication 16.07.2008
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Method of self-aligning a damascene gate structure to isolation regions
NIEH, CHESTER, YEN, DANIEL, CHENG, WEI-HUA, LEE, TONG-BOON, CHUNG, CHING-THIAM
Year of Publication 21.08.2006
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Year of Publication 21.08.2006
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Method of self-aligning a damascene gate structure to isolation regions
NIEH, CHESTER, YEN, DANIEL, CHUNG, CHING-THIAM, CHENG, WEI HUA, LEE, TONG BOON
Year of Publication 20.04.2005
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Year of Publication 20.04.2005
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METHOD FOR SELF-ALIGNING DAMASCENE GATE STRUCTURE FOR SEPARATED REGIONS
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Year of Publication 30.04.2004
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Year of Publication 30.04.2004
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Method of self-aligning a damascene gate structure to isolation regions
Yen, Daniel, Chung, Ching-Thiam, Cheng, Wei Hua, Nieh, Chester, Lee, Tong Boon
Year of Publication 30.03.2004
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Year of Publication 30.03.2004
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Method of self-aligning a damascene gate structure to isolation regions
CHUNG CHING-THIAM, YEN DANIEL, LEE TONG BOON, CHENG WEI HUA, NIEH CHESTER
Year of Publication 30.03.2004
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Year of Publication 30.03.2004
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METHOD OF SELF-ALIGNING A DAMASCENE GATE STRUCTURE TO ISOLATION REGIONS
DANIEL YEN, WEI HUA CHENG, TONG BOON LEE, CHING-THIAM CHUNG, CHESTER NIEH
Year of Publication 26.03.2004
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Year of Publication 26.03.2004
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METHOD OF SELF-ALIGNING A DAMASCENE GATE STRUCTURE TO ISOLATION REGIONS
Yen, Daniel, Chung, Ching-Thiam, Cheng, Wei, Nieh, Chester, Lee, Tong
Year of Publication 26.02.2004
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Year of Publication 26.02.2004
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METHOD OF SELF-ALIGNING A DAMASCENE GATE STRUCTURE TO ISOLATION REGIONS
CHUNG CHING-THIAM, YEN DANIEL, LEE TONG BOON, CHENG WEI HUA, NIEH CHESTER
Year of Publication 26.02.2004
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Year of Publication 26.02.2004
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Method of self-aligning a damascene gate structure to isolation regions
NIEH, CHESTER, YEN, DANIEL, CHUNG, CHING-THIAM, CHENG, WEI HUA, LEE, TONG BOON
Year of Publication 25.02.2004
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Year of Publication 25.02.2004
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Method of self-aligning a damascene gate structure to isolation regions
NIEH, CHESTER, YEN, DANIEL, CHENG, WEI-HUA, LEE, TONG-BOON, CHUNG, CHING-THIAM
Year of Publication 01.03.2004
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Year of Publication 01.03.2004
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