Modeling of Apparent Activation Energy and Lifetime Estimation for Retention of 3D SGVC Memory
Hsiao, Wei-Hao, Wang, Nian-Jia, Lee, Ming-Yi, Kuo, Li-Kuang, Lin, Ding-Jhang, Chao, Yen-Hai, Lu, Chih-Yuan
Published in 2019 IEEE International Reliability Physics Symposium (IRPS) (01.03.2019)
Published in 2019 IEEE International Reliability Physics Symposium (IRPS) (01.03.2019)
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Conference Proceeding
Dielectric resolution enhancement coating technology (DiRECT) - a sub-90 nm space and hole patterning technology using 248-nm lithography and plasma-enhanced polymerization
Ming-Chung Liang, Hsin-Yi Tsai, Chia-Chi Chung, Cheng-Chen Hsueh, Chung, H., Chih-Yuan Lu
Published in IEEE electron device letters (01.09.2003)
Published in IEEE electron device letters (01.09.2003)
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Journal Article
A single-sided PHINES SONOS memory featuring high-speed and low-power applications
WU, Jau-Yi, LEE, Ming-Hsiu, HSU, Tzu-Hsuan, LUNG, Hsiang-Lan, LIU, Rich, LU, Chih-Yuan
Published in IEEE electron device letters (01.02.2006)
Published in IEEE electron device letters (01.02.2006)
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Journal Article
Reliability study of MANOS with and without a SiO2 buffer layer and BE-MANOS charge-trapping NAND flash devices
Chien-Wei Liao, Sheng-Chih Lai, Hang-Ting Lue, Ming-Jui Yang, Chin-Yen Shen, Yi-Hsien Lue, Yu-Fong Huang, Jung-Yu Hsieh, Szu-Yu Wang, Guang-Li Luo, Chao-Hsin Chien, Kuang-Yeu Hsieh, Rich Liu, Chih-Yuan Lu
Published in 2009 International Symposium on VLSI Technology, Systems, and Applications (01.04.2009)
Published in 2009 International Symposium on VLSI Technology, Systems, and Applications (01.04.2009)
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Conference Proceeding
Asymmetric etching profile control during high aspect ratio Plasma etch
Yang, Zusing, Wu, Li-Ian, Chang, Sheng-Yuan, Chiu, Yuan-Chieh, Lee, Hong-Ji, Lian, Nan-Tzu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan, Watanabe, Hayato, Cheng, Yinhwa, Arase, Takao, Mori, Masahito
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
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Conference Proceeding
A study of SONOS charge loss mechanism after hot-hole stressing using trap-layer engineering and electrical re-fill methods
Yi-Hsuan Hsiao, Hang-Ting Lue, Lee, M.Y., Shih-Chieh Huang, Tsung-Yi Chou, Szu-Yu Wang, Kuang-Yeu Hsieh, Rich Liu, Chih-Yuan Lu
Published in 2008 IEEE International Reliability Physics Symposium (01.04.2008)
Published in 2008 IEEE International Reliability Physics Symposium (01.04.2008)
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Conference Proceeding
Physical and electrical characteristics of silicon oxynitride films with various refractive indices
Liao, Jeng-Hwa, Hsieh, Jung-Yu, Lin, Hsing-Ju, Tang, Wei-Yao, Chiang, Chun-Ling, Lo, Yun-Shan, Wu, Tai-Bor, Yang, Ling-Wu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan
Published in Journal of physics. D, Applied physics (07.09.2009)
Published in Journal of physics. D, Applied physics (07.09.2009)
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Journal Article
Study of Charge Loss Mechanism of SONOS-Type Devices using Hot-Hole Erase and Methods to Improve the Charge Retention
Hang-Ting Lue, Yi-Hsuan Hsiao, Yen-Hao Shih, Erh-Kun Lai, Kuang-Yeu Hsieh, Rich Liu, Chih-Yuan Lu
Published in 2006 IEEE International Reliability Physics Symposium Proceedings (01.01.2006)
Published in 2006 IEEE International Reliability Physics Symposium Proceedings (01.01.2006)
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RTN modulation by neighboring word-line Vt level in 1Xnm floating gate NAND strings
Cheng, C.C., Chen, Y.H., Wang, C.P., Cheng, C.H., Lee, C.W., Lin, T.W., Ku, S.H., Chang, Y.W., Tsai, W.J., Lu, T.C., Chen, K.C., Wang, Tahui, Lu, Chih-Yuan
Published in 2018 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) (01.04.2018)
Published in 2018 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) (01.04.2018)
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Conference Proceeding
Study of Ti/TiN bump defect formation mechanism and elimination by etch process optimization
Wu, Li-Lan, Chiu, Yuan-Chieh, Yang, Zusing, Chang, Sheng-Yuan, Lee, Hong-Ji, Lian, Nan-Tzu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
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Conference Proceeding
Systematic Hot Spots Finding By Pattern Search with Similarity
Luoh, Tuung, Lv, Rong, Chen, Chi-min, Liao, Hsiang-Chou, Yang, Ling-Wu, Yang, Ta-hone, Chen, Kuang-Chao, Lu, Chih-Yuan
Published in ECS transactions (2014)
Published in ECS transactions (2014)
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Journal Article
A comprehensive study of 3-stage high resistance state retention behavior for TMO ReRAMs from single cells to a large array
Yu-Hsuan Lin, Yung-Han Ho, Ming-Hsiu Lee, Chao-Hung Wang, Yu-Yu Lin, Feng-Ming Lee, Kai-Chieh Hsu, Po-Hao Tseng, Dai-Ying Lee, Kuang-Hao Chiang, Keh-Chung Wang, Tseung-Yuen Tseng, Chih-Yuan Lu
Published in 2017 IEEE International Electron Devices Meeting (IEDM) (01.12.2017)
Published in 2017 IEEE International Electron Devices Meeting (IEDM) (01.12.2017)
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Conference Proceeding
A physics-based Quasi-2D model to understand the wordline (WL) interference effects of junction-free structure of 3D NAND and experimental study in a 3D NAND flash test chip
Wei-Chen Chen, Hang-Ting Lue, Chih-Chang Hsieh, Yung-Chun Lee, Pei-Ying Du, Tzu-Hsuan Hsu, Kuo-Pin Chang, Keh-Chung Wang, Chih-Yuan Lu
Published in 2017 IEEE International Electron Devices Meeting (IEDM) (01.12.2017)
Published in 2017 IEEE International Electron Devices Meeting (IEDM) (01.12.2017)
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Conference Proceeding
A novel double-density single-gate vertical-channel (SGVC) 3D NAND flash featuring a flat-channel device with excellent layer uniformity
Hang-Ting Lue, Chia-Jung Chiu, Chih-Yuan Lu
Published in 2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) (01.04.2016)
Published in 2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) (01.04.2016)
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Conference Proceeding
V Retention Distribution Tail in a Multitime-Program MLC SONOS Memory Due to a Random-Program-Charge-Induced Current-Path Percolation Effect
Yueh-Ting Chung, Tzu-I Huang, Chi-Wei Li, You-Liang Chou, Jung-Piao Chiu, Tahui Wang, Lee, M. Y., Kuang-Chao Chen, Chih-Yuan Lu
Published in IEEE transactions on electron devices (01.05.2012)
Published in IEEE transactions on electron devices (01.05.2012)
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Journal Article
Guest editorial special section on single-wafer manufacturing in the nanochip era
Singh, R., Chih-Yuan Lu, Koike, A., Thompson, M., Thakur, R.P.S.
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
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Journal Article
Smart Review Sampling Methodology in Huge Inspection Results
Luoh, Tuung, Lv, Rong, Chen, Chi-min, Liao, Hsiang-Chou, Yang, Ling Wu, Yang, Ta-hone, Chen, Kuang Chao, Lu, Chih Yuan
Published in ECS transactions (2014)
Published in ECS transactions (2014)
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Journal Article
A Novel Channel-Program-Erase Technique with Substrate Transient Hot Carrier Injection for SONOS Memory Application
Tzu-Hsuan Hsu, Jau-Yi Wu, Ya Chin King, Hang Ting Lue, Yen Hao Shih, Erh-Kun Lai, Kuang-Yeu Hsieh, Rich Liu, Chih-Yuan Lu
Published in 2006 European Solid-State Device Research Conference (01.09.2006)
Published in 2006 European Solid-State Device Research Conference (01.09.2006)
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Conference Proceeding