Hydrogen determination in silicon nitride films by the nuclear recoil method
Chernov, I.P., Shadrin, V.N., Cherdantsev, Ju.P., Sulema, V.N., Chramova, L.V., Smirnova, T.P., Belyi, V.I.
Published in Thin solid films (05.02.1982)
Published in Thin solid films (05.02.1982)
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