Distortion and overlay performance of UV step and repeat imprint lithography
Choi, Jin, Nordquist, Kevin, Cherala, Ashuman, Casoose, Lester, Gehoski, Kathy, Dauksher, William J., Sreenivasan, S.V., Resnick, Douglas J.
Published in Microelectronic engineering (01.03.2005)
Published in Microelectronic engineering (01.03.2005)
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