Ammonium chloride (–NH3+Cl-) salt formation from dichlorosilane decomposition and its potential impact on silicon nitride atomic layer deposition
Yang, Tsung-Hsuan, Cheng, Erik S., Johnson, Samuel M., Iwao, Toshihiko, Zhao, Jianping, Ekerdt, John G., L. G. Ventzek, Peter, Hwang, Gyeong S.
Published in Applied surface science (30.08.2023)
Published in Applied surface science (30.08.2023)
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