Comparative study of piston mode designs for temperature-compensated surface acoustic wave resonators using SiO2/LiNbO3 structure
Li, Yawei, Gong, Keyuan, Wong, Yu-Po, Chen, Pingjing, Wu, Zhaohui, Liang, Qi, Bao, Jing-fu, Hashimoto, Kenya
Published in Japanese Journal of Applied Physics (01.07.2022)
Published in Japanese Journal of Applied Physics (01.07.2022)
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Journal Article
Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression
Pan, Hongzhi, Yang, Yang, Li, Lingqi, Zhang, Qiaozhen, Zheng, Zeyu, Du, Xuesong, Chen, Pingjing, Dong, Jiahe, Lu, Chuan, Xie, Xiao, Li, Hualin, Xiao, Qiang, Ma, Jinyi, Chen, Zhenglin
Published in Micromachines (Basel) (01.01.2024)
Published in Micromachines (Basel) (01.01.2024)
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Journal Article
Comparative study of piston mode designs for temperature-compensated surface acoustic wave resonators using SiO 2 /LiNbO 3 structure
Li, Yawei, Gong, Keyuan, Wong, Yu-Po, Chen, Pingjing, Wu, Zhaohui, Liang, Qi, Bao, Jing-fu, Hashimoto, Kenya
Published in Japanese Journal of Applied Physics (01.07.2022)
Published in Japanese Journal of Applied Physics (01.07.2022)
Get full text
Journal Article
Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO 3 /SiO 2 /Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression
Pan, Hongzhi, Yang, Yang, Li, Lingqi, Zhang, Qiaozhen, Zheng, Zeyu, Du, Xuesong, Chen, Pingjing, Dong, Jiahe, Lu, Chuan, Xie, Xiao, Li, Hualin, Xiao, Qiang, Ma, Jinyi, Chen, Zhenglin
Published in Micromachines (Basel) (21.12.2023)
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Published in Micromachines (Basel) (21.12.2023)
Journal Article
Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO[sub.3]/SiO[sub.2]/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression
Pan, Hongzhi, Yang, Yang, Li, Lingqi, Zhang, Qiaozhen, Zheng, Zeyu, Du, Xuesong, Chen, Pingjing, Dong, Jiahe, Lu, Chuan, Xie, Xiao, Li, Hualin, Xiao, Qiang, Ma, Jinyi, Chen, Zhenglin
Published in Micromachines (Basel) (01.12.2023)
Published in Micromachines (Basel) (01.12.2023)
Get full text
Journal Article