Method for controlling consumption of cleaning gas in processing chamber and processing system
LIN, WEING, CHEN, YU-PIN, CHEN, HUNG-DE, SUN, HSIAO-YUNG, PENG, KUO-YANG, YUAN, LIAOIEH, LAI, HUNGUNG, CHU, KUN-KUN
Year of Publication 01.07.2022
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Year of Publication 01.07.2022
Patent
Method for controlling consumption of cleaning gas in processing chamber and processing system
LIN, WEING, CHEN, YU-PIN, CHEN, HUNG-DE, SUN, HSIAO-YUNG, PENG, KUO-YANG, YUAN, LIAOIEH, LAI, HUNGUNG, CHU, KUN-KUN
Year of Publication 01.03.2022
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Year of Publication 01.03.2022
Patent