Highly Reliable Piezoelectric Process Technology in Volume Foundry for Emerging Mems Applications
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Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
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Conference Proceeding
MEMS technology development and manufacturing in a CMOS foundry
Liu, C.M., Lin, Chung-Hsien, Chung, Tien-Kan, Chang, Kuei-Sung, Liu, Yi-Shao, Chou, Bruce C.S., Tsai, Robert Chin-Fu, Shen, Nick Y.M., Chen, Benior S.F., Cheng, Emerson C.W., Tuan, Hsiao Chin, Kalnitsky, Alex, Cheng, Sean
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
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Conference Proceeding
Process for eliminating delamination between amorphous silicon layers
Lee, Jiou-Kang, Cheng, Chun-Ren "Sean", Tsai, Shang-Ying, Wu, Ting-Hau, Chen, Hsiang-Fu "Benior"
Year of Publication 16.08.2011
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Year of Publication 16.08.2011
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