Application of finite element models for design of high-precision MEMS pressure sensors
Gridchin, V. A., Chebanov, M. A., Zinov'ev, V. B., Vasilyev, V. Yu
Published in 2014 12th International Conference on Actual Problems of Electronics Instrument Engineering (APEIE) (01.10.2014)
Published in 2014 12th International Conference on Actual Problems of Electronics Instrument Engineering (APEIE) (01.10.2014)
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Conference Proceeding
The influence of scaling effects on the characteristics of mesapiezoresistors with dielectric insulation
Chebanov, M. A., Gridchin, V. A., Cherkaev, A. S., Zinoviev, V. B., Neizvestnyi, I. G., Kamaev, G. N.
Published in 2012 7th International Forum on Strategic Technology (IFOST) (01.09.2012)
Published in 2012 7th International Forum on Strategic Technology (IFOST) (01.09.2012)
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Conference Proceeding
Features of micron-sized mesa-piezoresistor
Gridchin, V A, Chebanov, M A
Published in 2010 11th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices (01.06.2010)
Published in 2010 11th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices (01.06.2010)
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Conference Proceeding
FEM simulation of piezoresistive pressure module
Gridchin, V A, Chebanov, M A
Published in 2010 11th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices (01.06.2010)
Published in 2010 11th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices (01.06.2010)
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Conference Proceeding