An integrated force-balanced capacitive accelerometer for low- g applications
Chau, K.H.-L, Lewis, S.R, Zhao, Y, Howe, R.T, Bart, S.F, Marcheselli, R.G
Published in Sensors and actuators. A. Physical. (01.06.1996)
Published in Sensors and actuators. A. Physical. (01.06.1996)
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Journal Article
An Integrated Force-balanced Capacitive Accelerometer For Low-G Applications
Chau, K.H.-L., Lewis, S.R., Zhao, Y., Howe, R.T., Bart, S.F., Marcheselli, R.G.
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
Published in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (1995)
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Conference Proceeding
A versatile polysilicon diaphragm pressure sensor chip
Chau, K.H.-L., Fung, C.D., Harris, P.R., Dahrooge, G.A.
Published in International Electron Devices Meeting 1991 [Technical Digest] (1991)
Published in International Electron Devices Meeting 1991 [Technical Digest] (1991)
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Conference Proceeding