Intelligent Photolithography Corrections Using Dimensionality Reductions
Parashar, Parag, Akbar, Chandni, Rawat, Tejender S., Pratik, Sparsh, Butola, Rajat, Chen, Shih H., Chang, Yung-Sung, Nuannimnoi, Sirapop, Lin, Albert S.
Published in IEEE photonics journal (01.10.2019)
Published in IEEE photonics journal (01.10.2019)
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