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Surface Properties of the AlGaN/GaN Superlattice Grown at Different Temperatures by Metalorganic Chemical Vapor Deposition
by
Lai, Wei-Chih
,
Kuo, Cheng-Huang
,
Yen, Wei-Yu
,
Sheu, Jinng-Kong
,
Chang
,
Shoou
-
Jinng
Published in
Japanese Journal of Applied Physics
(01.12.2008)
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Journal Article
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engineering
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physics
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algan/gan superlattice
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mocvd
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physical sciences
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physics
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physics, applied
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science & technology
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English
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Institute of Physics Journals
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