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Published in 2014 20th International Conference on Ion Implantation Technology (IIT) (01.06.2014)
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Published in 2014 20th International Conference on Ion Implantation Technology (IIT) (01.06.2014)
Published in 2014 20th International Conference on Ion Implantation Technology (IIT) (01.06.2014)
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Year of Publication 05.04.2017
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Year of Publication 05.04.2017
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Year of Publication 17.01.2018
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Year of Publication 17.01.2018
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