Substrate plasma-processing apparatus
KANG TAE-WOOK, PARK JAE-MORK, JI CHANG-SOON, AN CHENG-GUO, CHO HYUN-LAE, LEE JEONG-YEOL, KIM OU-HYEN
Year of Publication 02.12.2014
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Year of Publication 02.12.2014
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JI CHANG-SOON, CHO WON-SEOK, SHIM HEY-YEON, JO YONG-HUN, KIM TAE-SEUNG, HAN SANG-JIN, LEE JONG-WOO
Year of Publication 15.10.2013
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Year of Publication 15.10.2013
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