The integrated pressure sensor with AlGaAs-baroresistors
Krivorotov, N.P., Svinolupov, Yu.G., Chan, A.V., Schegol, S.S.
Published in 1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98 (Cat. No.98EX179) (1998)
Published in 1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98 (Cat. No.98EX179) (1998)
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