Study on Cone-defects during the Pattern Fabrication Process with Silicon Nitride
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Published in Journal of Photopolymer Science and Technology (01.01.2015)
Published in Journal of Photopolymer Science and Technology (01.01.2015)
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METHOD OF MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE IN FORMING PLURAL INTERCONNECTIONS IN ONE IDENTICAL INTERCONNECTION LAYER OVER SEMICONDUCTOR SUBSTRATE
TADOKORO, MASAHIRO, CHAKIHARA, HIRAKU, NOGUCHI, MITSUHIRO, WADA, NAONORI, NISHIDA, AKIO
Year of Publication 08.12.2004
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Year of Publication 08.12.2004
Patent
SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
TAKAHASHI YASUHIKO, CHAKIHARA HIRAKU, OKUYAMA KOUSUKE, MONIWA MASAHIRO
Year of Publication 16.01.2004
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Year of Publication 16.01.2004
Patent