Encapsulated disk resonator gyroscope with differential internal electrodes
Chae HyuckAhn, Shin, Dongsuk D., Hong, Vu A., Yang, Yushi, Ng, Eldwin J., Yunhan Chen, Flader, Ian B., Kenny, Thomas W.
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
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