Semiconductor factory automation system and method for transporting semiconductor wafers
Kim, Jin-Sun, Kim, Moon-Gi, Hong, Chang-Kee, Lee, Tae-Ho, Cho, Won-Soo, Chae, Yung-Hwan, Lee, Woo-Kyu, Ahn, Jong-Mo, Lee, Kwang-Ho
Year of Publication 04.02.2003
Get full text
Year of Publication 04.02.2003
Patent
Semiconductor factory automation system and method for transporting semiconductor wafers
LEE, TAE-HO, LEE, KWANG-HO, CHAE, YUNG-HWAN, AHN, JONG-MO, LEE, WOO-KYU
Year of Publication 21.12.2002
Get full text
Year of Publication 21.12.2002
Patent
Semiconductor factory automation system and method for transporting semiconductor wafers
WOO-KYU LEE, KWANG-HO LEE, JONG-MO AHN, JIN-SUN KIM, TAE-HO LEE, WON-SOO CHO, CHANG-KEE HONG, MOON-GI KIM, YUNG-HWAN CHAE
Year of Publication 13.08.2003
Get full text
Year of Publication 13.08.2003
Patent
Semiconductor factory automation system and method for transporting semiconductor wafers
CHAE YUNG-HWAN, CHO WON-SOO, LEE TAE-HO, KIM MOON-GI, HONG CHANG-KEE, KIM JIN-SUN, LEE WOO-KYU, LEE KWANG-HO, AHN JONG-MO
Year of Publication 04.02.2003
Get full text
Year of Publication 04.02.2003
Patent
METHOD AND SYSTEM FOR AUTOMATING SEMICONDUCTOR FACTORY
HONG CHANGKI, CHAE YUNG-HWAN, CHO WON-SOO, LEE TAE-HO, KIM MOON-GI, LEE WOO-KYU, KIM JIN-SUN, LEE KWANG-HO, AHN JONG-MO
Year of Publication 26.12.2000
Get full text
Year of Publication 26.12.2000
Patent
Transporting semiconductor wafers in a factory automation system
WOO-KYU LEE, KWANG-HO LEE, JONG-MO AHN, JIN-SUN KIM, TAE-HO LEE, WON-SOO CHO, CHANG-KEE HONG, MOON-GI KIM, YUNG-HWAN CHAE
Year of Publication 20.12.2000
Get full text
Year of Publication 20.12.2000
Patent
Halbleiterfabrikautomatisierungssystem und Verfahren zum Transportieren von Halbleiterwafern
LEE, TAE-HO, KIM, MOON-GI, LEE, KWANG-HO, CHAE, YUNG-HWAN, AHN, JONG-MO, KIM, JIN-SUN, LEE, WOO-KYU, HONG, CHANG-KEE, CHO, WON-SOO
Year of Publication 18.01.2001
Get full text
Year of Publication 18.01.2001
Patent