Method for high throughput using beam scan size and beam position in gas cluster ion beam processing system
Joy, Nicholas, Shao, Yan, Leith, Allen J, Russell, Noel, Caliendo, Steven P, Chae, Soo Doo, LaRose, Joshua, Lagana-Gizzo, Vincent, Fernandez, Luis
Year of Publication 09.04.2019
Get full text
Year of Publication 09.04.2019
Patent
Interconnect structure and method of forming the same
CHAE, SOO DOO, CLARK, ROBERT D, YU, KAI-HUNG, SMITH, JEFFREY, LEUSINK, GERRIT J
Year of Publication 01.02.2022
Get full text
Year of Publication 01.02.2022
Patent
METHOD OF SURFACE PROFILE CORRECTION USING GAS CLUSTER ION BEAM
Chae Soo Doo, Joy Nicholas, LaRose Joshua, Russell Noel, Gizzo Vincent
Year of Publication 03.11.2016
Get full text
Year of Publication 03.11.2016
Patent
METHOD OF SURFACE PROFILE CORRECTION USING GAS CLUSTER ION BEAM
LAGANA-GIZZO, Vincent, LAROSE, Joshua, RUSSELL, Noel, CHAE, Soo, Doo, JOY, Nicholas
Year of Publication 03.11.2016
Get full text
Year of Publication 03.11.2016
Patent
Transistors with Chemically Synthesized Layered Semiconductor WS2 Exhibiting 105 Room Temperature Modulation and Ambipolar Behavior
Hwang, Wan Sik, Remskar, Maja, Rusen Yan, Protasenko, Vladimir, Tahy, Kristof, Chae, Soo Doo, Zhao, Pei, Konar, Aniruddha, Huili, Xing, Seabaugh, Alan, Jena, Debdeep
Published in arXiv.org (02.04.2012)
Published in arXiv.org (02.04.2012)
Get full text
Paper
Journal Article
Interconnect structure and method of forming the same
CHAE, SOO-DOO, CLARK, ROBERT D, YU, KAI-HUNG, SMITH, JEFFREY, LEUSINK, GERRIT J
Year of Publication 16.11.2018
Get full text
Year of Publication 16.11.2018
Patent