Evaluation of Size Distribution Measurement Methods for Sub-100 nm Colloidal Silica Nanoparticles and Its Application to CMP Slurry
Shin, Cheolmin, Choi, Jinhak, Kwak, Donggeon, Kim, Juhwan, Yang, Jichul, Chae, Seung-ki, Kim, Taesung
Published in ECS journal of solid state science and technology (2019)
Published in ECS journal of solid state science and technology (2019)
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Journal Article
PAG Concentration Dependence of the Vertical Density Profile in Photoresist
Kim, Jae Hyun, Ahn, Sung II, Kim, Yong-ho, Yoon, Jin Goo, Zin, Wang-Cheol, Chae, Seung-Ki
Published in Journal of Photopolymer Science and Technology (01.01.2010)
Published in Journal of Photopolymer Science and Technology (01.01.2010)
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Journal Article
Nonoxidative Aqueous Cleaning Solutions for Tungsten Layers
Park, Jung Dae, Kim, Se-Yeon, Lee, Da-Hee, Jun, Pil Kwon, Yi, Hun-Jung, Lee, Yang-Koo, Chae, Seung-Ki
Published in Journal of the Electrochemical Society (2009)
Published in Journal of the Electrochemical Society (2009)
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Journal Article
A New Approach to the Response Time Measurement Method of OLED TVs
Jung, Seung-Won, Cho, Jang-Hyun, Kang, Ho-Gil, Lee, Jin-Sang, Chae, Seung-Ki, Choi, Young-Seok
Published in Proceedings of the International Display Workshops (03.12.2021)
Published in Proceedings of the International Display Workshops (03.12.2021)
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Journal Article
POLISHING APPARATUS
KIM, TAE SUNG, SHIN, CHEOL MIN, KWAK, DONG GEON, CHAE, SEUNG KI, KIM, TAE JUN
Year of Publication 13.04.2018
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Year of Publication 13.04.2018
Patent
SLURRY COMPOSITION PREPARATION METHOD THEREOF AND POISHING METHOD USING THE SLURRY COMPOSITION
KIM, TAE SUNG, SHIN, CHEOL MIN, KWAK, DONG GEON, CHAE, SEUNG KI, KIM, TAE JUN
Year of Publication 27.02.2018
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Year of Publication 27.02.2018
Patent
Novel Non-Oxidative Aqueous Cleaning Solutions for Tungsten Layers
Park, Jung Dae, Kim, Se-Yeon, Lee, Da-Hee, Jun, Pil K., Yi, Hun-Jung, Chae, Seung-Ki
Published in ECS transactions (09.05.2008)
Published in ECS transactions (09.05.2008)
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Journal Article
Study on Uniform Deposition on 300 mm Silicon Wafer with Sub-100 nm Sized Particles for Cleaning Application
Lee, Seungjae, Kim, Tae Sung, Chae, Seung Ki, Oh, Haerim, Hong, Seokjun
Published in Solid state phenomena (01.02.2021)
Published in Solid state phenomena (01.02.2021)
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Journal Article
Investigation of a Standard Particle Deposition System on Wafer Surface and Its Application to Wafer Cleaning
Cho, Younsun, Hong, Seokjun, Lee, Seungjae, Yang, Jichul, Chae, Seung-Ki, Kim, Taesung
Published in ECS journal of solid state science and technology (01.01.2019)
Published in ECS journal of solid state science and technology (01.01.2019)
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Journal Article
COMPOSITION FOR ETCHING COPPER AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
LIM, KWANG SHIN, LEE, DA HEE, CHAE, SEUNG KI, JUN, PIL KWON, PARK, JUNG DAE
Year of Publication 02.06.2011
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Year of Publication 02.06.2011
Patent
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
KIM, JIN HO, BYUN, GYOUNG EUN, PARK, SUN HEE, KIM, KOOK JOO, CHAE, SEUNG KI, JUN, PIL KWON
Year of Publication 08.08.2012
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Year of Publication 08.08.2012
Patent
PLATING METHOD USING PHOTORESIST RESIDUE ANALYSIS METHOD IN PLATING SOLUTION
LEE, YOON MI, LEE, DA HEE, BAE, SUNG HOON, CHAE, SEUNG KI, JUN, PIL KWON, KIM, MIN JUNG, PARK, JUNG DAE
Year of Publication 25.07.2012
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Year of Publication 25.07.2012
Patent