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3-D Observation of dopant distribution at NAND flash memory floating gate using Atom probe tomography
by
Lee, Ji-hyun
,
Chae
,
Byeong
-
Kyu
,
Kim, Joong-Jeong
,
Lee, Sun Young
,
Park, Chan Gyung
Published in
Electronic materials letters
(2015)
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Journal Article
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engineering
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atom probe
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carbon
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characterization and evaluation of materials
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chemistry and materials science
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condensed matter physics
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diffusion barrier
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English
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